Chophikira cha Sapphire cha mainchesi 12 cha Kupanga Ma Semiconductor Amphamvu Kwambiri

Chophikira cha Sapphire cha mainchesi 12 cha Kupanga Semiconductor Yaikulu Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Wafer wa safiro wa mainchesi 12 wapangidwa kuti ukwaniritse kufunikira kwakukulu kwa kupanga ma semiconductor akuluakulu komanso optoelectronic. Pamene mapangidwe a zida akupitilira kukula ndipo mizere yopanga ikupita ku mitundu yayikulu ya wafer, ma substrates a safiro okhala ndi mainchesi akuluakulu amapereka zabwino zomveka bwino pakubala, kukonza zokolola, komanso kuwongolera ndalama.

Tumizani imelo kwa ife

Mawonekedwe

Chithunzi Chatsatanetsatane

Chiyambi cha wafer wa safiro wa mainchesi 12

Zopangidwa kuchokera ku Al₂O₃ yoyera kwambiri, ma wafer athu a safiro a mainchesi 12 amaphatikiza mphamvu yabwino kwambiri yamakina, kukhazikika kwa kutentha, komanso khalidwe la pamwamba. Kudzera mu kukula kwa kristalo kokonzedwa bwino komanso kukonza ma wafer molondola, magawo awa amapereka magwiridwe antchito odalirika a LED, GaN, ndi ntchito zapadera za semiconductor.

Makhalidwe a Zinthu

Sapphire (single-crystal aluminum oxide, Al₂O₃) imadziwika bwino chifukwa cha mphamvu zake zakuthupi komanso zamakemikolo. Ma wafer a safiro a mainchesi 12 amalandira zabwino zonse za nsalu ya safiro pomwe amapereka malo akuluakulu ogwiritsidwa ntchito.

Makhalidwe ofunikira a zinthu ndi awa:

Kuuma kwambiri komanso kukana kuvala
Kukhazikika kwabwino kwambiri kwa kutentha komanso malo osungunuka kwambiri
Kukana kwambiri mankhwala ku zidulo ndi alkali
Kuwala kwakukulu kwa kuwala kuchokera ku UV kupita ku IR wavelengths
Katundu wabwino kwambiri wotetezera magetsi

Makhalidwe amenewa amapangitsa kuti ma wafer a safiro a mainchesi 12 akhale oyenera kugwiritsidwa ntchito m'malo ovuta komanso opangira zinthu zotentha kwambiri.

Njira Yopangira

Kupanga ma wafer a safiro a mainchesi 12 kumafuna kukula kwapamwamba kwa kristalo ndi ukadaulo wopangira zinthu molondola kwambiri. Njira yodziwika bwino yopangira zinthu imaphatikizapo:

Kukula kwa Makristalo Amodzi
Makristalo a safiro oyeretsedwa kwambiri amalimidwa pogwiritsa ntchito njira zapamwamba monga KY kapena ukadaulo wina waukulu wokulirapo wa makristalo, kuonetsetsa kuti makristalo akuyang'ana mofanana komanso kuti mkati mwake musakhale ndi nkhawa kwambiri.
Kupanga ndi Kudula Makristalo
Chigoba cha safiro chimapangidwa bwino kwambiri ndipo chimadulidwa m'ma wafer a mainchesi 12 pogwiritsa ntchito zida zodulira zolondola kwambiri kuti muchepetse kuwonongeka kwa pansi pa nthaka.
Kupala ndi Kupukuta
Njira zolumikizira zinthu mozungulira komanso zopukutira makina (CMP) zimagwiritsidwa ntchito kuti pakhale kusalala, kusalala, komanso makulidwe ofanana bwino.
Kuyeretsa ndi Kuyang'anira
Chikwama chilichonse cha safiro cha mainchesi 12 chimayeretsedwa bwino ndikuyang'aniridwa mosamala, kuphatikizapo ubwino wa pamwamba, TTV, uta, kupotoza, ndi kusanthula zolakwika.

Mapulogalamu

Ma wafer a safiro a mainchesi 12 amagwiritsidwa ntchito kwambiri muukadaulo wapamwamba komanso watsopano, kuphatikizapo:

Ma LED amphamvu kwambiri komanso owala kwambiri
Zipangizo zamagetsi zochokera ku GaN ndi zipangizo za RF
Chonyamulira zida za semiconductor ndi zotetezera kutentha
Mawindo a kuwala ndi zida zazikulu zowunikira
Ma phukusi apamwamba a semiconductor ndi zonyamulira zapadera

Kukula kwake kwakukulu kumathandiza kuti zinthu ziyende bwino komanso kuti pakhale ndalama zambiri.

Ubwino wa Ma Wafers a Sapphire a mainchesi 12

Malo akuluakulu ogwiritsidwa ntchito kuti chipangizo chilichonse chitulutse mphamvu zambiri
Kugwirizana bwino kwa njira ndi kufanana
Kutsika mtengo pa chipangizo chilichonse popanga zinthu zambiri
Mphamvu yabwino kwambiri yamakina yogwiritsira ntchito zazikulu
Mafotokozedwe osinthika a ntchito zosiyanasiyana

Zosankha Zosintha

Timapereka zosintha zosinthika za ma wafer a safiro a mainchesi 12, kuphatikiza:

Kuyang'ana kwa kristalo (C-plane, A-plane, R-plane, ndi zina zotero)
Kulemera ndi kulekerera kwa m'mimba mwake
Kupukuta mbali imodzi kapena mbali ziwiri
Mbiri ya m'mphepete ndi kapangidwe ka chamfer
Zofunikira pakukula ndi kusalala pamwamba

Chizindikiro	Kufotokozera	Zolemba
M'mimba mwake wa chofufumitsa	Mainchesi 12 (300 mm)	Wafer wamba wa mainchesi akulu
Zinthu Zofunika	Sapphire wa kristalo imodzi (Al₂O₃)	Kuyera kwambiri, giredi yamagetsi/yowala
Kuyang'ana kwa Makristalo	Ndege ya C (0001), Ndege ya A (11-20), Ndege ya R (1-102)	Mayendedwe osankha alipo
Kukhuthala	430–500 μm	Kukhuthala kwapadera kumapezeka mukapempha
Kulekerera Kunenepa	±10 μm	Kulekerera kwamphamvu kwa zipangizo zapamwamba
Kusiyana Kwa Kukhuthala Konse (TTV)	≤10 μm	Zimaonetsetsa kuti ntchito yofanana ikuchitika pa wafer
Uta	≤50 μm	Kuyezedwa pa wafer yonse
Kupindika	≤50 μm	Kuyezedwa pa wafer yonse
Kumaliza Pamwamba	Wopukutidwa mbali imodzi (SSP) / Wopukutidwa mbali ziwiri (DSP)	Malo apamwamba kwambiri owoneka bwino
Kukhwima kwa Pamwamba (Ra)	≤0.5 nm (yopukutidwa)	Kusalala kwa atomiki pakukula kwa epitaxial
Mbiri Yam'mphepete	Mphepete mwa chamfer / m'mphepete wozungulira	Kuti mupewe kusweka pogwira ntchito
Kulondola kwa Kuwongolera	± 0.5°	Zimathandizira kukula bwino kwa gawo la epitaxial
Kuchulukana kwa chilema	<10 cm⁻²	Kuyesedwa ndi kuyang'anira kwa kuwala
Kusalala	≤2 μm / 100 mm	Zimathandizira kuti lithography ikhale yofanana komanso kukula kwa epitaxial
Ukhondo	Kalasi 100 - Kalasi 1000	Zimagwirizana ndi chipinda chotsukira
Kutumiza kwa Kuwala	>85% (UV–IR)	Zimadalira kutalika kwa thambo ndi makulidwe

Mafunso Ofunsidwa Kawirikawiri a Sapphire Wafer a mainchesi 12

Q1: Kodi makulidwe a waya wa safiro wa mainchesi 12 ndi otani?
A: Kukhuthala kokhazikika kumayambira pa 430 μm mpaka 500 μm. Kukhuthala kopangidwa mwamakonda kumatha kupangidwanso malinga ndi zosowa za makasitomala.

Q2: Ndi ma kristalo ati omwe amapezeka pa ma wafer a safiro a mainchesi 12?
A: Timapereka njira zoyendetsera C-plane (0001), A-plane (11-20), ndi R-plane (1-102). Njira zina zoyendetsera zitha kusinthidwa kutengera zomwe chipangizocho chikufuna.

Q3: Kodi kusiyana konse kwa makulidwe (TTV) kwa wafer ndi kotani?
A: Ma wafer athu a safiro a mainchesi 12 nthawi zambiri amakhala ndi TTV ≤10 μm, zomwe zimapangitsa kuti pakhale kufanana pa wafer yonse kuti ipangidwe bwino kwambiri.

Zambiri zaife

XKH imagwira ntchito kwambiri pakupanga, kupanga, ndi kugulitsa magalasi apadera a kuwala ndi zinthu zatsopano zamakristalo. Zogulitsa zathu zimapereka zinthu zamagetsi, zamagetsi, ndi zankhondo. Timapereka zinthu za Sapphire optical, zophimba ma lens a foni yam'manja, Ceramics, LT, Silicon Carbide SIC, Quartz, ndi ma crystal wafers a semiconductor. Ndi ukatswiri waluso komanso zida zamakono, timachita bwino kwambiri pokonza zinthu zosakhazikika, cholinga chathu ndi kukhala kampani yotsogola kwambiri yaukadaulo wamagetsi.