SiC Ceramic Tray End Effector Wafer Handling Custom-Made Components

SiC Ceramic Tray End Effector Wafer Yogwira Zida Zopangidwa Mwamwambo ndi Chithunzi Chowonetsedwa

Kufotokozera Kwachidule:

Zodziwika bwino	Mayunitsi	Makhalidwe
Kapangidwe		FCC β gawo
Kuwongolera	Gawo (%)	111 zokonda
Kuchulukana kwakukulu	g/cm³	3.21
Kuuma	Vickers kuuma	2500
Kutentha Mphamvu	J·kg⁻¹·K⁻¹	640
Kukula kwa kutentha 100–600 °C (212–1112 °F)	10⁻⁶·K⁻¹	4.5
Young's Modulus	GPA (4pt bend, 1300°C)	430
Ukulu wa Mbewu	μm	2-10
Kutentha kwa Sublimation	°C	2700
Flexural Mphamvu	MPa (RT 4-point)	415
Thermal conductivity	(W/mK)	300

Titumizireni imelo

Mawonekedwe

SiC Ceramic & Alumina Ceramic Custom Components Mwachidule

Silicon Carbide (SiC) Ceramic Custom Components

Silicon Carbide (SiC) zida za ceramic za ceramic ndi zida za ceramic zomwe zimagwira ntchito kwambiri m'mafakitale omwe amadziwika chifukwa cha ntchito zake.kuuma kwambiri, kukhazikika kwamafuta kwambiri, kukana kwa dzimbiri kwapadera, komanso kusinthasintha kwamafuta. Silicon Carbide (SiC) zida za ceramic za ceramic zimathandizira kuti pakhale batamalo otentha kwambiri pamene akukana kukokoloka kwa asidi amphamvu, alkalis, ndi zitsulo zosungunuka. SiC ceramics amapangidwa kudzera munjira mongakuyimba mopanda kukanikizidwa, kuyimba motere, kapena kuyimba movutikirandipo imatha kusinthidwa kukhala mawonekedwe ovuta, kuphatikiza mphete zosindikizira zamakina, manja a shaft, ma nozzles, machubu ang'anjo, mabwato ophatikizika, ndi mbale zomangira zosavala.

Alumina Ceramic Custom Components

Alumina (Al₂O₃) zida zama ceramic zimatsindikahigh insulation, zabwino makina mphamvu, ndi kuvala kukana. Zodziwika ndi magiredi aukhondo (mwachitsanzo, 95%, 99%), Alumina (Al₂O₃) zida za ceramic zokhala ndi makina olondola zimalola kuti zipangidwe kukhala zotsekera, mayendedwe, zida zodulira, ndi zoyika zachipatala. Alumina ceramics amapangidwa makamaka kudzerakukanikiza kowuma, kuumba jekeseni, kapena kukakamiza kwa isostatic, zokhala ndi zinthu zopukutira mpaka pagalasi.

XKH imagwira ntchito pa R&D ndikupanga makonda asilicon carbide (SiC) ndi alumina (Al₂O₃) ceramics. Zopangira za ceramic za SiC zimayang'ana kwambiri kutentha kwambiri, kuvala kwambiri, komanso kuwononga malo, kuphimba ntchito za semiconductor (monga mabwato ophatikizika, ma cantilever paddles, machubu a ng'anjo) komanso zigawo zamafuta ndi zisindikizo zapamwamba zamagulu atsopano amagetsi. Zopangira za aluminiyamu za ceramic zimagogomezera kutchinjiriza, kusindikiza, ndi zinthu zachilengedwe, kuphatikiza magawo amagetsi, mphete zosindikizira zamakina, ndi implants zachipatala. Kugwiritsa ntchito matekinoloje mongakukanikiza kwa isostatic, sinteringlessless sintering, ndi makina olondola, timapereka njira zogwirira ntchito zapamwamba zamafakitale kuphatikiza ma semiconductors, photovoltaics, aerospace, medical, and chemical processing, kuwonetsetsa kuti zigawozi zikukwaniritsa zofunikira zomveka bwino, moyo wautali, ndi kudalirika muzochitika zovuta kwambiri.

SiC Ceramic Functional Chucks & CMP Grinding Discs Chiyambi

SiC Ceramic Vacuum Chucks

Silicon Carbide (SiC) Ceramic Vacuum Chucks ndi zida zokongoletsedwa zotsogola kwambiri zopangidwa kuchokera kuzinthu zowoneka bwino za silicon carbide (SiC) za ceramic. Amapangidwa makamaka kuti azigwiritsidwa ntchito zomwe zimafuna ukhondo komanso kukhazikika, monga semiconductor, photovoltaic, ndi mafakitale opangira zinthu mwaluso. Ubwino wawo waukulu ndi: malo opukutidwa pagalasi, (kusalala komwe kumayendetsedwa mkati mwa 0.3-0.5 μm), kuuma kwambiri komanso kutsika kwapang'onopang'ono kwa kukula kwamafuta (kuwonetsetsa kuti mawonekedwe a nano-level ndi kukhazikika kwamalo), mawonekedwe opepuka kwambiri ((kuchepetsa kulimba kwambiri) mpaka 9.5, kupitilira nthawi yayitali ya zitsulo zachitsulo). Zinthuzi zimathandizira kugwira ntchito mokhazikika m'malo okhala ndi kutentha kwakukulu ndi kutsika, dzimbiri zamphamvu, komanso kuwongolera kothamanga kwambiri, kumathandizira kwambiri kukolola komanso kupanga bwino kwazinthu zowongoka bwino monga zowotcha ndi zinthu zowoneka bwino.

Silicon Carbide (SiC) Bump Vacuum Chuck for Metrology and Inspection

Chopangidwira njira zowunikira zowonongeka, chida chapamwamba kwambiri chotsatsachi chimapangidwa kuchokera ku silicon carbide (SiC) ceramic material . Kapangidwe kake kapamwamba kapamwamba kamene kamapereka mphamvu yamphamvu yotsatsira vacuum, kwinaku akuchepetsa malo olumikizirana ndi chopindika, potero amateteza kuwonongeka kapena kuipitsidwa ndi mawonekedwe ophatikizika ndikuwonetsetsa kukhazikika komanso kulondola pakuwunika. Chuck imakhala ndi kusalala kwapadera (0.3-0.5 μm) ndi malo opukutidwa ndi galasi, ophatikizidwa ndi kulemera kopepuka kwambiri, komanso kuuma kwakukulu, kuwonetsetsa kukhazikika pakuyenda kothamanga kwambiri. Kutsika kwake kocheperako pakukulitsa kutentha kumatsimikizira kukhazikika kwapang'onopang'ono kusinthasintha kwa kutentha, pomwe kukana kwamphamvu kumawonjezera moyo wautumiki. Chogulitsacho chimathandizira kusinthidwa mwamakonda mu 6, 8, ndi 12-inch kuti akwaniritse zosowa zowunika zamitundu yosiyanasiyana yophika.

Flip Chip Bonding Chuck

Flip chip bonding chuck ndi gawo lofunikira kwambiri pakupanga ma chip-chip bonding, omwe adapangidwa makamaka kuti azitha kutsatsa bwino, kuti zitsimikizire kukhazikika pakanthawi kothamanga kwambiri, kolondola kwambiri. Imakhala ndi malo opukutidwa ndi galasi (kusalala/kufanana ≤1 μm) ndi ma groove olondola a gasi, kuti akwaniritse mphamvu yofananira ya vacuum adsorption, kupewa kuthamangitsidwa kapena kuwonongeka. Kuuma kwake kwakukulu, komanso kocheperako kocheperako pakukulitsa matenthedwe (pafupi ndi zinthu za silicon) kumatsimikizira kukhazikika kokhazikika m'malo omangika kwambiri, pomwe zinthu zolimba kwambiri (mwachitsanzo, silicon carbide kapena zoumba zapadera) zimalepheretsa kufalikira kwa mpweya, kusunga kukhazikika kwanthawi yayitali. Makhalidwewa pamodzi amathandizira kulondola kwa ma micron-level, ndikuwonjezera kwambiri zokolola za ma chip.

SiC Bonding Chuck

Silicon carbide (SiC) bonding chuck ndi njira yopangira ma chip bonding, yopangidwira kutsatsa bwino komanso kuteteza zowotcha, kuwonetsetsa kuti zimagwira ntchito mokhazikika pansi pa kutentha kwambiri komanso kupanikizika kwambiri. Wopangidwa kuchokera ku high-sensity silicon carbide ceramic (porosity <0.1%), amakwaniritsa kugawa kwamphamvu kofananira (kupotoka <5%) kudzera pa nanometer-level mirror polishing (kuuma kwapamtunda Ra <0.1 μm) ndi mizere yolondola ya gasi grooves ((pore 0 μ μm) kulepheretsa kuwonongeka kwapang'onopang'ono: 5m-. Kukula kwake kotsika kwambiri (4.5 × 10⁻⁶/℃) kumagwirizana kwambiri ndi zowotcha za silicon, kuchepetsa kupsinjika komwe kumayambitsa kupsinjika. Kuphatikizidwa ndi kuuma kwakukulu (yotanuka modulus> 400 GPa) ndi ≤1 μm flatness/parallelism, zimatsimikizira kulondola kwa kulumikizana. Imagwiritsidwa ntchito kwambiri pakuyika kwa semiconductor, 3D stacking, ndi kuphatikiza kwa Chiplet, imathandizira kupanga kwapamwamba kwambiri komwe kumafunikira kulondola kwa nanoscale komanso kukhazikika kwamafuta.

CMP Grinding Disc

CMP grinding disc ndi gawo lalikulu la zida za Chemical mechanical polishing (CMP), zomwe zimapangidwira kuti zizigwira motetezeka komanso zikhazikike zowotchera panthawi yopukutira kothamanga kwambiri, zomwe zimathandizira kulinganiza kwapadziko lonse lapansi kwa nanometer. Wopangidwa kuchokera ku zinthu zolimba kwambiri, zolimba kwambiri (mwachitsanzo, zoumba za silicon carbide kapena ma aloyi apadera), zimawonetsetsa kuti ma vacuum adsorption amafanana kudzera m'mizere yolondola kwambiri ya gasi. Malo ake opukutidwa pagalasi (kusalala/kufanana ≤3 μm) amatsimikizira kukhudzana kopanda kupsinjika ndi zowotcha, pomwe chowonjezera chotsika kwambiri chakukula kwamafuta (chofanana ndi silicon) ndi mayendedwe ozizira amkati amapondereza bwino kutentha. Kugwirizana ndi zowotcha za 12-inch (750 mm m'mimba mwake), ukadaulo wa disc umathandizira kuphatikizika kosasunthika komanso kudalirika kwa nthawi yayitali kwamapangidwe amitundu yosiyanasiyana pansi pa kutentha kwakukulu ndi kupsinjika, kupititsa patsogolo kwambiri njira ya CMP ndi zokolola.

Zoyambira Zosiyanasiyana za SiC Ceramics

Silicon Carbide (SiC) Square Mirror

Silicon Carbide (SiC) Square Mirror ndi chinthu chowoneka bwino kwambiri chopangidwa kuchokera ku silicon carbide ceramic yapamwamba, yopangidwira zida zapamwamba zopangira semiconductor monga makina a lithography. Imakwaniritsa kulemera kowala kwambiri, komanso kuuma kwakukulu (elastic modulus> 400 GPa) kudzera mu kapangidwe kake kopepuka (mwachitsanzo, kutsekeka kwa zisa kuseri), pomwe kutentha kwake kumatsika kwambiri (≈4.5 × 10⁻⁶ kutsika / kutsika). Kalilore pamwamba, pambuyo kupukuta mwatsatanetsatane, amafika ≤1 μm flatness/kufanana, ndipo kukana kwapadera kwa mavalidwe (Mohs hardness 9.5) kumawonjezera moyo wautumiki. Amagwiritsidwa ntchito kwambiri m'malo opangira makina a lithography, zowunikira ma laser, ndi ma telescopes am'mlengalenga momwe kulondola kwambiri komanso kukhazikika ndikofunikira.

Silicon Carbide (SiC) Maupangiri a Air Floatation

Ma Silicon Carbide (SiC) Air Floatation Guides amagwiritsa ntchito ukadaulo wosalumikizana ndi aerostatic, pomwe mpweya woponderezedwa umapanga filimu yamlengalenga ya micron (yomwe nthawi zambiri imakhala 3-20μm) kuti ikwaniritse kuyenda kosalala komanso kopanda kugwedezeka. Amapereka kulondola kwa kayendedwe ka nanometric (kubwereza mobwerezabwereza mpaka ± 75nm) ndi sub-micron geometric kulondola (kuwongoka ± 0.1-0.5μm, flatness ≤1μm) , yothandizidwa ndi kuwongolera mayankho otsekedwa ndi masikelo olondola a grating kapena laser interferometer. core silicon carbide ceramic material (zosankha zikuphatikizapo Coresic® SP/Marvel Sic series) zimapereka kuuma kopitilira muyeso (elastic modulus> 400 GPa), ultra-low thermal expansion coefficient (4.0–4.5×10⁻⁶/K, kufananitsa silicon) <. Mapangidwe ake opepuka (kachulukidwe 3.1g/cm³, wachiwiri kwa aluminiyamu) amachepetsa kusuntha, pomwe kukana kwapadera (Mohs hardness 9.5) komanso kukhazikika kwamafuta kumatsimikizira kudalirika kwanthawi yayitali pansi pa liwiro lalikulu (1m / s) komanso kuthamanga kwambiri (4G). Maupangiri awa amagwiritsidwa ntchito kwambiri mu semiconductor lithography, kuwunika kwawafer, ndi makina olondola kwambiri.

Silicon Carbide (SiC) Cross-Beams

Silicon Carbide (SiC) Cross-Beams ndi zigawo zoyambira zomwe zimapangidwira zida za semiconductor komanso ntchito zamafakitale apamwamba kwambiri, zomwe zimagwira ntchito kunyamula magawo ophatikizika ndikuwatsogolera m'njira zomwe zafotokozedwa mothamanga kwambiri, kopitilira muyeso. Pogwiritsa ntchito silicon carbide ceramic yapamwamba (zosankha zikuphatikizapo Coresic® SP kapena Marvel Sic series) ndi mapangidwe opepuka, amapeza kulemera kwakukulu ndi kuuma kwakukulu (elastic modulus> 400 GPa), pamodzi ndi ultra-low coefficient of thermal expansion 5 × 10/⁶ ⁄⁶ ⁶ ⁶ ⁶ ⁶ ⁶ ⁶ ⁶ ⁶ ⁶ ⁄4 kachulukidwe ( porosity <0.1%), kuonetsetsa kukhazikika kwa nanometric (kusalala / kufanana ≤1μm) pansi pa kupsinjika kwamafuta ndi makina. Zida zawo zophatikizika zimathandizira ntchito zothamanga kwambiri komanso zothamanga kwambiri (mwachitsanzo, 1m / s, 4G), kuzipangitsa kukhala zabwino pamakina amtundu wa lithography, makina owunikira mawafa, ndi kupanga mwatsatanetsatane, kupititsa patsogolo kulondola koyenda komanso kuyankha mwachangu.

Silicon Carbide (SiC) Motion Components

Silicon Carbide (SiC) Motion Components ndi magawo ofunikira omwe amapangidwira makina oyenda bwino kwambiri a semiconductor, pogwiritsa ntchito zida zapamwamba za SiC (mwachitsanzo, Coresic® SP kapena Marvel Sic series, porosity <0.1%) ndi mapangidwe opepuka opangidwa kuti akwaniritse kulemera kowala kwambiri (400 stifflus yolimba kwambiri) Ndi choyezera chotsika kwambiri cha kukula kwamafuta (≈4.5×10⁻⁶/℃), amawonetsetsa kukhazikika kwa nanometric (kusalala/kufanana ≤1μm) pansi pa kusinthasintha kwamafuta. Zinthu zophatikizikazi zimathandizira magwiridwe antchito othamanga komanso othamanga kwambiri (mwachitsanzo, 1m/s, 4G), kuwapanga kukhala abwino pamakina amtundu wa lithography, makina owunikira ma wafer, ndi kupanga mwatsatanetsatane, kupititsa patsogolo kulondola koyenda komanso kuyankha mwachangu.

Silicon Carbide (SiC) Optical Path Plate

Silicon Carbide (SiC) Optical Path Plate ndi nsanja yoyambira yomwe idapangidwa kuti ikhale ndi njira ziwiri zowonera pazida zowunikira. Wopangidwa kuchokera ku high-performance silicon carbide ceramic, amakwaniritsa zopepuka kwambiri ((kachulukidwe ≈3.1 g/cm³) komanso kuuma kwakukulu, (elastic modulus> 400 GPa) kudzera pamapangidwe opepuka, pomwe amakhala ndi mphamvu yocheperako yocheperako ya ther. (≈4.5 × 10⁻⁶/℃) ndi kachulukidwe kwambiri ( porosity <0.1%), kuonetsetsa kukhazikika kwa nanometric ( flatness/parallelism ≤0.02mm) pansi pa kusinthasintha kwamafuta ndi makina. Ndi kukula kwake kwakukulu (900 × 900mm) komanso magwiridwe antchito apadera, imapereka maziko okhazikika anthawi yayitali a makina owoneka bwino, kumathandizira kwambiri kuwunika komanso kudalirika. Amagwiritsidwa ntchito kwambiri mu semiconductor metrology, kuyang'ana kwa kuwala, ndi makina oyerekeza olondola kwambiri.

Graphite + Tantalum Carbide Coated Guide mphete

The Graphite + Tantalum Carbide Coated Guide Ring ndi gawo lofunikira lomwe limapangidwira zida za silicon carbide (SiC) single crystal kukula. Ntchito yake yayikulu ndikuwongolera ndendende kutentha kwa gasi, kuwonetsetsa kuti kutentha ndi kukhazikika kwa madera oyenda mkati mwa chipinda chochitiramo. Wopangidwa kuchokera ku gawo lapansi lapamwamba la graphite substrate (kuyera> 99.99%) wokutidwa ndi CVD-deposited tantalum carbide (TaC) wosanjikiza (zophimba zonyansa <5 ppm), zimawonetsa kutenthetsa kwapadera (≈120 W/m·K) (kutentha kwambiri kwamankhwala) komanso kutentha kwambiri 2200 ° C), kuteteza bwino kuwonongeka kwa nthunzi ya silicon ndikupondereza kufalikira kwa zonyansa. Chophimbacho chimakhala chofanana kwambiri (kupatuka <3%, kuphimba kwathunthu) kumatsimikizira chiwongolero chokhazikika cha gasi komanso kudalirika kwautumiki kwanthawi yayitali, kumathandizira kwambiri kukula ndi zokolola za SiC single crystal kukula.

Silicon Carbide (SiC) Furnace Tube Abstract

Silicon Carbide (SiC) Vertical Furnace Tube

Silicon Carbide (SiC) Vertical Furnace Tube ndi gawo lofunikira lomwe limapangidwira zida zamafakitale zotentha kwambiri, zomwe zimagwiritsidwa ntchito ngati chubu chodzitchinjiriza kunja, kuwonetsetsa kugawidwa kwamafuta ofanana mkati mwa ng'anjo pansi pamlengalenga, ndi kutentha kwanthawi zonse pafupifupi 1200 ° C. Wopangidwa kudzera muukadaulo wophatikizira wosindikiza wa 3D, umakhala ndi zinthu zonyansa <300 ppm, ndipo ukhoza kukhala ndi zokutira za CVD silicon carbide (zovala zonyansa <5 ppm). Kuphatikiza ma conductivity apamwamba amafuta (≈20 W/m·K) ndi kukhazikika kwapadera kwamafuta (kukana matenthedwe amafuta> 800 ° C), amagwiritsidwa ntchito kwambiri pakutentha kwanthawi yayitali monga chithandizo cha kutentha kwa semiconductor, sintering yazinthu zamoto, komanso kupanga mwatsatanetsatane kwa ceramic, kupititsa patsogolo zida zanthawi yayitali.

Silicon Carbide (SiC) Horizontal Furnace Tube

Silicon Carbide (SiC) Horizontal Furnace Tube ndi gawo lofunikira lomwe limapangidwira njira zotentha kwambiri, zomwe zimagwira ntchito ngati chubu chogwira ntchito mumlengalenga wokhala ndi mpweya (gasi wokhazikika), nayitrogeni (gasi woteteza), komanso kufufuza hydrogen chloride, ndi kutentha kwanthawi zonse pafupifupi 1250 ° C pafupifupi 1250 ° C. Wopangidwa kudzera muukadaulo wophatikizira wosindikiza wa 3D, umakhala ndi zinthu zonyansa <300 ppm, ndipo ukhoza kukhala ndi zokutira za CVD silicon carbide (zovala zonyansa <5 ppm). Kuphatikiza kutenthetsa kwapamwamba (≈20 W/m·K) ndi kukhazikika kwapadera kwa kutentha kwamphamvu (kukana matenthedwe> 800 ° C), ndikoyenera pakufunsira kwa semiconductor monga makutidwe ndi okosijeni, kufalikira, ndi kuyika kwakanema, kuwonetsetsa kuti kamangidwe, kusasunthika, kukhazikika kwanthawi yayitali, kukhazikika kwanthawi yayitali.

Chiyambi cha SiC Ceramic Fork Arms

Kupanga Semiconductor

Popanga zowotcha za semiconductor, mikono ya foloko ya SiC ceramic imagwiritsidwa ntchito kwambiri kusamutsa ndikuyika zowotcha, zomwe zimapezeka mu:

Zida Zopangira Wafer: Monga makaseti ophatikizika ndi mabwato opangira, omwe amagwira ntchito mokhazikika m'malo otentha kwambiri komanso owononga.
Makina a Lithography: Amagwiritsidwa ntchito m'zigawo zolondola monga masitepe, maupangiri, ndi manja a robotic, pomwe kulimba kwawo komanso kutsika kwamafuta kumatsimikizira kulondola kwa nanometer.
Etching and Diffusion processs: Kugwira ntchito ngati ma tray etching a ICP ndi zida za semiconductor diffusion process, kuyera kwawo kwakukulu komanso kukana kwa dzimbiri kumalepheretsa kuipitsidwa m'zipinda zopangira.

Industrial Automation ndi Robotics

Mikono ya foloko ya SiC ceramic ndizofunikira kwambiri pamaroboti ochita bwino kwambiri m'mafakitale ndi zida zamagetsi:

Ma Robotic End Effects: Amagwiritsidwa ntchito pogwira, kusonkhanitsa, komanso kuchita bwino. Makhalidwe awo opepuka (kachulukidwe ~ 3.21 g/cm³) amathandizira liwiro la loboti komanso kuchita bwino, pomwe kulimba kwawo (Vickers hardness ~ 2500) kumatsimikizira kukana kwapadera.
Mizere Yopangira Makina: Pazinthu zomwe zimafuna kuwongolera pafupipafupi, kulondola kwambiri (mwachitsanzo, malo osungiramo malonda a e-commerce, kusungirako fakitale), zida za SiC za foloko zimatsimikizira kugwira ntchito kwanthawi yayitali.

Zamlengalenga ndi Mphamvu Zatsopano

M'malo ovuta kwambiri, zida za SiC ceramic fork zimakulitsa kukana kwawo kutentha kwambiri, kukana dzimbiri, komanso kukana kugwedezeka kwamafuta:

Azamlengalenga: Amagwiritsidwa ntchito m'zigawo zofunika kwambiri za mlengalenga ndi ma drones, pomwe katundu wawo wopepuka komanso wamphamvu kwambiri amathandizira kuchepetsa kulemera ndi kupititsa patsogolo ntchito.
Mphamvu Zatsopano: Zimagwiritsidwa ntchito pazida zopangira mafakitale a photovoltaic (mwachitsanzo, ng'anjo zoyatsira) komanso ngati zida zolongosoka popanga batire la lithiamu-ion.

High-Temperature Industrial Processing

Mikono ya foloko ya SiC ceramic imatha kupirira kutentha kopitilira 1600 ° C, kuwapanga kukhala oyenera:

Metallurgy, Ceramics, and Glass Industries: Amagwiritsidwa ntchito muzitsulo zotentha kwambiri, ma setter plates, ndi push plates.
Mphamvu za nyukiliya: Chifukwa cha kukana kwawo kwa ma radiation, ndizoyenera pazinthu zina zamanyukiliya.

Zida Zachipatala

Pazachipatala, mikono ya foloko ya SiC ceramic imagwiritsidwa ntchito makamaka pa:

Maloboti Achipatala ndi Zida Zopangira Opaleshoni: Amayamikiridwa chifukwa cha biocompatibility, kukana dzimbiri, komanso kukhazikika m'malo otsekereza.

SiC Coating mwachidule

Kupaka kwa SiC ndi wosanjikiza wowonda komanso wosavala wa silicon carbide wokonzedwa kudzera mu njira ya Chemical Vapor Deposition (CVD). Kuphimba uku kumagwira ntchito yofunika kwambiri pamayendedwe a semiconductor epitaxial chifukwa cha kukana kwake kwa dzimbiri, kukhazikika kwabwino kwa kutentha, komanso matenthedwe apamwamba (kuyambira 120–300 W/m·K). Pogwiritsa ntchito ukadaulo waukadaulo wa CVD, timayika mosanjikiza kagawo kakang'ono ka SiC pagawo la graphite, kuwonetsetsa kuti zokutirazo ndizoyera komanso zowona.

Kuphatikiza apo, zonyamulira zokhala ndi SiC zimawonetsa mphamvu zapadera zamakina komanso moyo wautali wautumiki. Amapangidwa kuti azitha kupirira kutentha kwambiri (kutha kugwira ntchito kwanthawi yayitali kuposa 1600 ° C) komanso mikhalidwe yovuta yamankhwala yomwe imachitika pakupanga ma semiconductor. Izi zimawapangitsa kukhala chisankho chabwino kwa ma wafers a GaN epitaxial, makamaka pamapulogalamu apamwamba kwambiri komanso amphamvu kwambiri monga masiteshoni oyambira a 5G ndi ma amplifiers akutsogolo a RF.

Zambiri za SiC Coating

Zodziwika bwino	Mayunitsi	Makhalidwe
Kapangidwe		FCC β gawo
Kuwongolera	Gawo (%)	111 zokonda
Kuchulukana kwakukulu	g/cm³	3.21
Kuuma	Vickers kuuma	2500
Kutentha Mphamvu	J·kg-1 ·K-1	640
Kukula kwa kutentha 100–600 °C (212–1112 °F)	10-6K-1	4.5
Young's Modulus	Gpa (4pt bend, 1300 ℃)	430
Ukulu wa Mbewu	μm	2-10
Kutentha kwa Sublimation	℃	2700
Felexural Mphamvu	MPa (RT 4-point)	415
Thermal conductivity	(W/mK)	300

Silicon Carbide Ceramic Structural Parts mwachidule

Zida za Silicon Carbide Ceramic Structural Parts

Silicon carbide ceramic structural particles amatengedwa kuchokera ku silicon carbide particles olumikizidwa palimodzi kudzera sintering. Amagwiritsidwa ntchito kwambiri m'magalimoto, makina, mankhwala, semiconductor, ukadaulo wamlengalenga, ma microelectronics, ndi magawo amagetsi, amatenga gawo lofunikira pakugwiritsa ntchito zosiyanasiyana mkati mwa mafakitalewa. Chifukwa cha mawonekedwe ake apadera, zida za silicon carbide ceramic structural particles zakhala zida zabwino kwambiri pamikhalidwe yovuta yokhudzana ndi kutentha kwambiri, kuthamanga kwambiri, dzimbiri, komanso kuvala, kumapereka magwiridwe antchito odalirika komanso moyo wautali m'malo ovuta.

Zigawozi zimadziwika chifukwa cha matenthedwe apamwamba kwambiri, omwe amathandizira kutengera kutentha kwapang'onopang'ono pamitundu yosiyanasiyana ya kutentha kwambiri. Kutentha kwachilengedwe kwa silicon carbide ceramics kumawathandiza kupirira kutentha kwachangu popanda kusweka kapena kulephera, kuonetsetsa kudalirika kwa nthawi yayitali m'malo otentha kwambiri.

Kukana kwachilengedwe kwa okosijeni kwa silicon carbide ceramic structural components kumawapangitsa kukhala oyenera kugwiritsidwa ntchito m'malo omwe ali ndi kutentha kwambiri komanso mlengalenga wotulutsa okosijeni, kutsimikizira magwiridwe antchito komanso kudalirika.

SiC Seal Parts mwachidule

Zisindikizo za SiC ndizosankha bwino pamadera ovuta (monga kutentha kwambiri, kuthamanga kwambiri, zowononga zowonongeka, ndi kuvala kwachangu) chifukwa cha kuuma kwawo kwapadera, kukana kuvala, kukana kutentha kwambiri (kupirira kutentha mpaka 1600 ° C kapena ngakhale 2000 ° C), ndi kukana kwa dzimbiri. Kutentha kwawo kwakukulu kumapangitsa kuti kutentha kutheke bwino, pomwe mikangano yawo yocheperako komanso zodzipaka mafuta zimatsimikizira kudalirika kwa kusindikiza komanso moyo wautali wautumiki pansi pamikhalidwe yovuta kwambiri. Makhalidwewa amapangitsa kuti zisindikizo za SiC zizigwiritsidwa ntchito kwambiri m'mafakitale monga petrochemicals, migodi, kupanga semiconductor, kuyeretsa madzi onyansa, ndi mphamvu, kuchepetsa kwambiri mtengo wokonza, kuchepetsa nthawi yopuma, komanso kupititsa patsogolo zipangizo zogwirira ntchito ndi chitetezo.

SiC Ceramic Plates Mwachidule

Ma mbale a ceramic a Silicon Carbide (SiC) amadziwika chifukwa cha kuuma kwawo kwapadera (kuuma kwa Mohs mpaka 9.5, wachiwiri kwa diamondi), kutulutsa kwapadera kwamafuta, (kuposa kwambiri zida zadothi zowongolera bwino kutentha), komanso kusagwira bwino ntchito kwamankhwala komanso kukana kutenthedwa kwamafuta (mopanda ma acid amphamvu, ma acid amphamvu ndi kutentha kwa alkali). Katunduwa amaonetsetsa kukhazikika kwadongosolo komanso magwiridwe antchito odalirika m'malo ovuta kwambiri (mwachitsanzo, kutentha kwambiri, ma abrasion, ndi dzimbiri), pomwe amatalikitsa moyo wautumiki ndikuchepetsa zofunikira zosamalira.

SiC ceramic mbale amagwiritsidwa ntchito kwambiri m'magawo apamwamba:

•Abrasives and Grinding Tools: Kugwiritsa ntchito kulimba kopitilira muyeso popanga mawilo opera ndi zida zopukutira, kukulitsa kulondola komanso kulimba m'malo opukutira.

•Zida Zowonongeka: Zimagwira ntchito ngati zoyatsira ng’anjo ndi zida za ng’anjo, kusunga bata pamwamba pa 1600°C kuti kutentha kukhale kothandiza komanso kuchepetsa mtengo wokonza.

• Semiconductor Industry: Kuchita ngati magawo a zida zamagetsi zamphamvu kwambiri (monga ma diode amagetsi ndi ma amplifiers a RF), kuthandizira magwiridwe antchito amphamvu kwambiri komanso kutentha kwambiri kuti alimbikitse kudalirika komanso kuwongolera mphamvu.

•Kuponya ndi Kusungunula: Kusintha zinthu zakale pokonza zitsulo pofuna kuonetsetsa kuti kutentha kumayendetsedwa bwino komanso kusachita dzimbiri kwamankhwala, kumapangitsa kuti zitsulo zikhale zolimba komanso zotsika mtengo.

SiC Wafer Boat Abstract

Maboti a XKH SiC ceramic amapereka kukhazikika kwapamwamba kwamafuta, kusakhazikika kwamankhwala, uinjiniya wolondola, komanso kuyendetsa bwino chuma, ndikupereka yankho logwira ntchito kwambiri popanga semiconductor. Amathandizira kwambiri chitetezo cha kaphatikizidwe kakang'ono, ukhondo, komanso kupanga bwino, kuwapangitsa kukhala zinthu zofunika kwambiri pakupangira zowotcha zapamwamba.

SiC ceramic boti Makhalidwe:

•Kukhazikika Kwapadera kwa Thermal Stability & Mechanical Strength : Yopangidwa kuchokera ku silicon carbide (SiC) ceramic, imapirira kutentha kopitilira 1600 ° C, kwinaku ikusunga umphumphu pansi pa njinga yamoto yotentha. Kutsika kwake kowonjezera kutentha kumachepetsa kusinthika ndi kusweka, kuwonetsetsa kulondola komanso chitetezo chopindika panthawi yogwira.

•High Purity & Chemical Resistance: Yopangidwa ndi ultra-high-purity SiC, imawonetsa kukana kwambiri ma acid, alkalis, ndi ma plasmas owononga. Malo olowera amalepheretsa kuipitsidwa ndi kuwotcha kwa ayoni, kuteteza kuyera kwa wafer ndikuwongolera zokolola za chipangizocho.

• Precision Engineering & Customization : Amapangidwa mololera mwamphamvu kuti agwirizane ndi kukula kwake kozungulira (monga 100mm mpaka 300mm), kumapereka kutsetsereka kwapamwamba, miyeso ya slot yofanana, ndi chitetezo cha m'mphepete. Mapangidwe osinthika amatengera zida zamagetsi ndi zofunikira za zida.

• Utali Wautali & Kugwiritsa Ntchito Ndalama : Poyerekeza ndi zinthu zakale (mwachitsanzo, quartz, alumina), SiC ceramic imapereka mphamvu zamakina apamwamba, kulimba kwa fracture, komanso kukana kugwedezeka kwamafuta, kumatalikitsa moyo wautumiki, kuchepetsa kubweza m'malo, ndikutsitsa mtengo wonse wa umwini pomwe ukukulitsa zotulutsa.

SiC ceramic boti Ntchito:

Maboti a ceramic a SiC amagwiritsidwa ntchito kwambiri pamachitidwe a semiconductor akutsogolo, kuphatikiza:

•Deposition Processes: Monga LPCVD (Low-Pressure Chemical Vapor Deposition) ndi PECVD (Plasma-Enhanced Chemical Vapor Deposition).

•Machiritso a Kutentha Kwambiri: Kuphatikizira kutenthetsa oxidation, kutsekereza, kufalikira, ndi kuyika ma ion.

•Njira Zonyowa ndi Zoyeretsera: Kutsuka kwawafer ndi magawo ogwiritsira ntchito mankhwala.

Zimagwirizana ndi mlengalenga komanso mayendedwe a vacuum,

ndiabwino kwa nsalu zofuna kuchepetsa kuopsa kwa kuipitsidwa ndikuwongolera kupanga bwino.

Zosintha za SiC Wafer Boat:

Katundu Waumisiri
Mlozera	Chigawo	Mtengo
Dzina lazinthu		Reaction Sintered Silicon Carbide	Pressureless Sintered Silicon Carbide	Recrystallized Silicon Carbide
Kupanga		Mtengo wa RBSiC	SSiC	R-SiC
Kuchulukana Kwambiri	g/cm3	3	3.15 ± 0.03	2.60-2.70
Flexural Mphamvu	MPa (kpsi)	338 (49)	380 (55)	80-90 (20°C) 90-100(1400°C)
Compressive Mphamvu	MPa (kpsi)	1120 (158)	3970 (560)	> 600
Kuuma	Knoop	2700	2800	/
Kuphwanya Kukhazikika	MPa m1/2	4.5	4	/
Thermal Conductivity	W/mk	95	120	23
Coefficient of Thermal Expansion	10^-6.1/°C	5	4	4.7
Kutentha Kwapadera	Uwu/g 0k	0.8	0.67	/
Kutentha kwakukulu mumlengalenga	℃	1200	1500	1600
Elastic Modulus	Gpa	360	410	240

SiC Ceramics Zosiyanasiyana Zowonetsera Mwambo

SiC Ceramic Membrane

SiC ceramic membrane ndi njira yapamwamba yosefera yopangidwa kuchokera ku silicon carbide yoyera, yokhala ndi mawonekedwe osanjikiza atatu (wosanjikiza, wosanjikiza, ndi nembanemba yolekanitsa) yopangidwa ndi njira zotentha kwambiri. Kapangidwe kameneka kamatsimikizira mphamvu zamakina zapadera, kugawa koyenera kwa pore, komanso kukhazikika kwapadera. Imapambana m'mafakitale osiyanasiyana polekanitsa bwino, kuyika, ndi kuyeretsa madzimadzi. Ntchito zazikuluzikulu zimaphatikizapo kuyeretsa madzi ndi madzi oyipa (kuchotsa zolimba zoyimitsidwa, mabakiteriya, ndi zowononga zachilengedwe), kukonza zakudya ndi zakumwa (kumveketsa komanso kuyika timadziti, mkaka, ndi zakumwa zotupitsa), ntchito zamankhwala ndi biotechnology (kuyeretsa biofluids ndi intermediates), kukonza mankhwala (kusefa ndi madzi owononga ndi madzi otulutsa mafuta), kuchotsa zonyansa).

Mapaipi a SiC

Machubu a SiC (silicon carbide) ndi zida za ceramic zogwira ntchito kwambiri zomwe zimapangidwira makina opangira ng'anjo ya semiconductor, opangidwa kuchokera ku silicon carbide yoyeretsedwa kwambiri pogwiritsa ntchito njira zotsogola. Amawonetsa kutentha kwapadera, kukhazikika kwapamwamba (kupitilira 1600 ° C), komanso kukana kwa dzimbiri kwa mankhwala. Kutsika kwawo kocheperako komanso mphamvu zamakina apamwamba zimatsimikizira kukhazikika kwapang'onopang'ono panjinga yotentha kwambiri, kumachepetsa kupsinjika kwa kutentha ndi kuvala. Machubu a SiC ndi oyenera ng'anjo zoyatsira, ng'anjo za okosijeni, ndi machitidwe a LPCVD/PECVD, zomwe zimathandizira kugawa kwa kutentha kofananira komanso kukhazikika kwadongosolo kuti muchepetse kuwonongeka kwa zopindika ndikuwongolera mawonekedwe amtundu wowonda. Kuphatikiza apo, mawonekedwe owundana, osakhala ndi porous komanso kusakhazikika kwamankhwala kwa SiC kumakana kukokoloka kwa mpweya wotuluka monga okosijeni, haidrojeni, ndi ammonia, kukulitsa moyo wautumiki ndikuwonetsetsa ukhondo. Machubu a SiC amatha kusinthidwa kukula kwake ndi makulidwe a khoma, ndikumata mwatsatanetsatane kuti akwaniritse malo osalala amkati komanso kukhazikika kwakukulu kuti athandizire kuyenda kwa laminar ndi mbiri yabwino yamafuta. Zosankha zakupukuta kapena zokutira zimachepetsanso kupanga tinthu tating'onoting'ono ndikukulitsa kukana kwa dzimbiri, kukwaniritsa zofunikira zopanga semiconductor kuti zikhale zolondola komanso zodalirika.

SiC Ceramic Cantilever Paddle

Mapangidwe a monolithic a SiC cantilever blades amathandizira kwambiri kulimba kwamakina ndi kufanana kwamafuta pomwe amachotsa zolumikizana ndi zofooka zomwe zimapezeka muzinthu zophatikizika. Pamwamba pake ndi opukutidwa bwino kwambiri mpaka kumapeto kwa kalilole, kuchepetsa kupanga tinthu ting'onoting'ono komanso kukwaniritsa miyezo yaukhondo. Inertia yachilengedwe ya SiC imalepheretsa kutuluka kwa mpweya, dzimbiri, ndi kuipitsidwa kwa zinthu m'malo ochitapo kanthu (monga mpweya, nthunzi), kuwonetsetsa kukhazikika ndi kudalilika pakufalikira/kutulutsa okosijeni. Ngakhale kuyendetsa njinga mwachangu, SiC imasunga umphumphu, kukulitsa moyo wautumiki ndikuchepetsa nthawi yokonza. Kupepuka kwa SiC kumathandizira kuyankha mwachangu, kufulumizitsa kutentha / kuziziritsa ndikuwongolera zokolola ndi mphamvu zamagetsi. Masambawa amapezeka m'miyeso yosinthika (yogwirizana ndi 100mm mpaka 300mm + zowotcha) ndipo amasinthira kumitundu yosiyanasiyana ya ng'anjo, ndikupereka magwiridwe antchito mosasinthika pamachitidwe akutsogolo ndi kumbuyo kwa semiconductor.

Chiyambi cha Alumina Vacuum Chuck

Al₂O₃ vacuum chucks ndi zida zofunika kwambiri pakupanga semiconductor, kupereka chithandizo chokhazikika komanso cholondola panjira zingapo:•Thinning: Amapereka chithandizo chofananira panthawi yopatulira, kuonetsetsa kuti gawo lapansi lichepetsedwe bwino kwambiri kuti chip chiwonongeke komanso kugwira ntchito kwa chipangizocho.
•Dicing: Amapereka kutsatsa kotetezeka panthawi yokhotakhota, kuchepetsa kuwonongeka ndikuwonetsetsa kudulidwa koyera kwa tchipisi tating'ono.
•Kuyeretsa: Malo ake osalala, ofananirako amathandizira kuchotsa zinyalala popanda kuwononga zopindika poyeretsa.
•Transport: Imapereka chithandizo chodalirika komanso chotetezeka panthawi yonyamula ndi kunyamula mawafa, kuchepetsa kuopsa kwa kuwonongeka ndi kuipitsidwa.

Makhalidwe Ofunika a Al₂O₃ Vacuum Chuck:

1.Uniform Micro-Porous Ceramic Technology
• Amagwiritsa ntchito ma nano-ufa kuti apange pores omwe amagawidwa mofanana komanso ogwirizana, zomwe zimapangitsa kuti pakhale porosity kwambiri komanso mawonekedwe osakanikirana kuti athandizidwe mokhazikika komanso odalirika.

2.Katundu Wapadera
-Yopangidwa kuchokera ku 99.99% alumina yoyera kwambiri (Al₂O₃), ikuwonetsa:
• Thermal Properties: Kukana kutentha kwakukulu komanso kusinthasintha kwabwino kwa kutentha, koyenera kumadera otentha kwambiri a semiconductor.
•Mechanical Properties: Mphamvu zazikulu ndi kulimba zimatsimikizira kulimba, kusavala, komanso moyo wautali wautumiki.
Ubwino Wowonjezera: Kutsekereza kwamagetsi kwamphamvu komanso kukana dzimbiri, zosinthika kutengera momwe zinthu zimapangidwira.

3. Kusanja Kwapamwamba ndi Kufanana• Imawonetsetsa kuti kabati kakang'ono kamene kamagwiritsidwa ntchito moyenera komanso kokhazikika kamakhala kosalala komanso kofananira, kuchepetsa kuopsa kwa zowonongeka ndikuwonetsetsa kuti zotsatira zake sizingasinthe. Kuthekera kwake kwa mpweya wabwino ndi mphamvu yofananira ya adsorption kumawonjezera kudalirika kwa magwiridwe antchito.

The Al₂O₃ vacuum chuck imaphatikiza ukadaulo wapamwamba wa micro-porous, zinthu zakuthupi zapadera, komanso kulondola kwapamwamba, kuthandizira njira zofunikira za semiconductor, kuwonetsetsa kuti zikuyenda bwino, zodalirika, komanso kuwongolera kuipitsidwa papang'onopang'ono, kudulira, kuyeretsa, ndi kunyamula magawo.

Alumina Robot Arm & Alumina Ceramic End Effector Mwachidule

Mikono ya robotic ya Alumina (Al₂O₃) ndiyofunikira kwambiri pakugwirira ntchito kwa ma semiconductor. Amalumikizana mwachindunji ndi zowotcha ndipo ali ndi udindo wosamutsa ndikuyika m'malo ovuta kwambiri monga vacuum kapena kutentha kwambiri. Phindu lawo lalikulu lagona pakuwonetsetsa chitetezo chawafer, kupewa kuipitsidwa, ndikuwongolera magwiridwe antchito a zida ndi zokolola kudzera muzinthu zapadera.

a-typical-wafer-transfer-robot_230226_副本

Feature Dimension	Kufotokozera Mwatsatanetsatane
Mechanical Properties	Aluminium yoyera kwambiri (mwachitsanzo,> 99%) imapereka kuuma kwakukulu (kuuma kwa Mohs mpaka 9) ndi mphamvu yosunthika (mpaka 250-500 MPa), kuwonetsetsa kukana kuvala ndikupewa kusinthika, potero kumakulitsa moyo wautumiki.
Electrical Insulation	Kulimbana ndi kutentha m'zipinda kufika pa 10¹⁵ Ω·cm ndi mphamvu yotsekereza ya 15 kV/mm, imateteza bwino ma electrostatic discharge (ESD), kumateteza zowombana zomveka kuti zisasokonezedwe ndi magetsi.
Thermal Stability	Malo osungunuka mpaka 2050 ° C amathandizira kupirira kutentha kwambiri (mwachitsanzo, RTA, CVD) popanga semiconductor. Kutentha kocheperako kumachepetsa kusinthasintha ndikusunga kukhazikika pakatentha.
Chemical Inertness	Imalowetsa ma acid ambiri, ma alkalis, magesi opangira zinthu, ndi zoyeretsera, kuteteza kuipitsidwa kwa tinthu kapena kutulutsidwa kwa chitsulo. Izi zimapangitsa kuti pakhale malo opangira zinthu zoyera kwambiri komanso zimapewa kuipitsidwa ndi malo ozungulira.
Ubwino Zina	Okhwima processing luso amapereka mkulu mtengo-mwachangu; Pamwamba pakhoza kukhala wopukutidwa bwino mpaka kukhala wokhuthala pang'ono, ndikuchepetsanso ziwopsezo zakubadwa.

Mikono ya robotic ya aluminiyamu imagwiritsidwa ntchito makamaka popanga zida zam'tsogolo, kuphatikiza:

• Kugwira ndi Kuyika kwa Wafer : Kusamutsa motetezeka komanso moyenera ndikuyika zowotcha (monga kukula kwa 100mm mpaka 300mm) m'malo opanda mpweya kapena osayera kwambiri, kuchepetsa kuwonongeka ndi kuipitsidwa.

•High-Temperature Processes: Monga Rapid thermal annealing (RTA), Chemical vapor deposition (CVD), ndi plasma etching, komwe amakhalabe okhazikika pansi pa kutentha kwakukulu, kuonetsetsa kuti ndondomeko ikugwirizana ndi zokolola.

•Automated Wafer Handling Systems: Zophatikizika kukhala maloboti ophatikizika ophatikizika ngati omaliza, kuti azitha kusinthana pakati pa zida, kupititsa patsogolo kupanga bwino.

Mapeto

XKH imagwira ntchito pa R&D ndikupanga zida za silicon carbide (SiC) ndi alumina (Al₂O₃) zida za ceramic, kuphatikiza mikono ya robotic, cantilever paddles, vacuum chucks, mabwato ophatikizika, machubu a ng'anjo, ndi zida zina zogwira ntchito kwambiri, zogwiritsa ntchito ma semiconductors, mphamvu zatsopano, malo okwerera ndege, ndi malo okwera. Timatsatira kupanga mwatsatanetsatane, kuwongolera bwino kwambiri, komanso luso laukadaulo, kugwiritsa ntchito njira zotsogola zotsogola (mwachitsanzo, sintering mosasunthika, kuchita sintering) ndi njira zolondola zamakina (mwachitsanzo, CNC kugaya, kupukuta) kuonetsetsa kukana kutentha kwambiri, mphamvu zamakina, kusakhazikika kwamankhwala, ndi kulondola kwatsatanetsatane. Timathandizira kusinthika motengera zojambula, kupereka mayankho ogwirizana amiyeso, mawonekedwe, kumaliza kwapamwamba, ndi magiredi azinthu kuti akwaniritse zofunikira zamakasitomala. Tadzipereka kupereka zida zodalirika komanso zogwira mtima za ceramic pazopanga zapamwamba zapadziko lonse lapansi, kupititsa patsogolo magwiridwe antchito a zida ndikuchita bwino kwa makasitomala athu.

Zam'mbuyo: Waya Wa diamondi Waya Wambiri Wapamwamba-Liwiro Lalikulu-Kulondola Kwambiri Pansi pa Swing Kudula Makina

Ena: Semi-Insulating Silicon Carbide (SiC) Substrate High-Purity Yamagalasi a Ar