Ukadaulo Wotsuka Wafer mu Kupanga Ma Semiconductor

Ukadaulo Wotsuka Wafer mu Kupanga Ma Semiconductor

Kuyeretsa ma wafer ndi gawo lofunika kwambiri pakupanga ma semiconductor ndipo ndi chimodzi mwazinthu zazikulu zomwe zimakhudza mwachindunji magwiridwe antchito a chipangizocho komanso kuchuluka kwa ntchito zomwe chimapanga. Pakupanga ma chip, ngakhale kuipitsidwa pang'ono kumatha kuwononga mawonekedwe a chipangizocho kapena kupangitsa kuti chilephereke. Zotsatira zake, njira zotsukira zimagwiritsidwa ntchito pafupifupi gawo lililonse lopangira kuti zichotse zodetsa pamwamba ndikuwonetsetsa kuti ma wafer ndi oyera. Kuyeretsa ndiye ntchito yodziwika kwambiri popanga ma semiconductor, chifukwa cha pafupifupi30% ya njira zonse zogwirira ntchito.

Ndi kukulitsa kosalekeza kwa kuphatikiza kwakukulu kwambiri (VLSI), ma node a process apita patsogolo ku28 nm, 14 nm, ndi kupitirira apo, zomwe zimapangitsa kuti zipangizo zikhale zolimba kwambiri, mizere yopapatiza, komanso njira zoyendetsera zinthu zikhale zovuta kwambiri. Ma node apamwamba amakhala osavuta kuipitsa, pomwe kukula kwa zinthu zazing'ono kumapangitsa kuti kuyeretsa kukhale kovuta. Chifukwa chake, kuchuluka kwa njira zoyeretsera kukupitirira kukwera, ndipo kuyeretsa kwakhala kovuta kwambiri, kofunikira kwambiri, komanso kovuta kwambiri. Mwachitsanzo, chip ya 90 nm nthawi zambiri imafuna pafupifupiMasitepe 90 oyeretsera, pomwe chip ya 20 nm imafuna pafupifupiMasitepe 215 oyeretseraPamene kupanga kukupitirira kufika pa 14 nm, 10 nm, ndi ma node ang'onoang'ono, chiwerengero cha ntchito zoyeretsa chidzapitirira kuwonjezeka.

Mwachidule,Kuyeretsa wafer kumatanthauza njira zomwe zimagwiritsa ntchito mankhwala, mpweya, kapena njira zakuthupi kuti zichotse zodetsa pamwamba pa waferZinthu zodetsa monga tinthu tating'onoting'ono, zitsulo, zotsalira za organic, ndi ma oxide achilengedwe zimatha kusokoneza magwiridwe antchito a chipangizocho, kudalirika kwake, komanso kukolola kwake. Kuyeretsa kumakhala ngati "mlatho" pakati pa njira zotsatizana zopangira - mwachitsanzo, musanayike ndi kuyika lithography, kapena mutatha kupukuta, CMP (kupukuta kwamakina a mankhwala), ndi kuyika ma ion. Mwambiri, kuyeretsa kwa wafer kumatha kugawidwa m'magulu awiri:kuyeretsa mwa kunyowandikuyeretsa kouma.

Kuyeretsa Mwa Kunyowa

Kuyeretsa mwa kunyowa kumagwiritsa ntchito mankhwala osungunulira kapena madzi oyeretsedwa (DIW) kuyeretsa ma wafer. Njira ziwiri zazikulu zimagwiritsidwa ntchito:

• Njira yomiza: ma wafer amaviikidwa m'matangi odzazidwa ndi zosungunulira kapena DIW. Iyi ndiyo njira yomwe imagwiritsidwa ntchito kwambiri, makamaka pa ma node aukadaulo okhwima.

• Njira yopopera: zosungunulira kapena DIW zimapopedwa pa ma wafer ozungulira kuti zichotse zinyalala. Ngakhale kumiza kumalola kukonza ma wafer angapo, kuyeretsa kwa spray kumagwirira ntchito wafer imodzi yokha pa chipinda chilichonse koma kumapereka ulamuliro wabwino, zomwe zimapangitsa kuti zikhale zofala kwambiri m'ma node apamwamba.

Kuyeretsa Mouma

Monga momwe dzinalo likusonyezera, kuyeretsa kouma kumapewa zosungunulira kapena DIW, m'malo mwake kugwiritsa ntchito mpweya kapena plasma kuchotsa zodetsa. Chifukwa cha kukakamiza kupita ku ma node apamwamba, kuyeretsa kouma kukukhala kofunika kwambiri chifukwa chakulondola kwambirikomanso kugwira ntchito bwino polimbana ndi zinthu zachilengedwe, ma nitride, ndi ma oxide. Komabe, zimafunikandalama zambiri zogulira zida, ntchito zovuta, komanso kuwongolera njira molimbikaUbwino wina ndi wakuti kuyeretsa kouma kumachepetsa kuchuluka kwa madzi otayira omwe amapangidwa ndi njira zonyowa.

Njira Zoyeretsera Zofala Kwambiri

1. Kuyeretsa kwa DIW (Madzi Opanda Ioni)

DIW ndiye chotsukira chomwe chimagwiritsidwa ntchito kwambiri poyeretsa mwachinyontho. Mosiyana ndi madzi osakonzedwa, DIW ilibe ma ayoni oyendetsera mpweya, kuteteza dzimbiri, kusintha kwa magetsi, kapena kuwonongeka kwa chipangizo. DIW imagwiritsidwa ntchito makamaka m'njira ziwiri:

1. Kuyeretsa pamwamba pa chidebe chokulungira mwachindunji– Kawirikawiri zimachitika mu single-wafer mode ndi ma rollers, maburashi, kapena ma spray nozzles panthawi yozungulira wafer. Vuto ndi kuchuluka kwa ma electrostatic charge, komwe kungayambitse zolakwika. Kuti izi zitheke, CO₂ (ndipo nthawi zina NH₃) imasungunuka mu DIW kuti iwonjezere mphamvu yamagetsi popanda kuipitsa wafer.

2. Kutsuka pambuyo poyeretsa mankhwala– DIW imachotsa njira zotsukira zotsalira zomwe zingapangitse kuti wafer kapena kuwononga magwiridwe antchito a chipangizocho ngati zitasiyidwa pamwamba.

2. Kuyeretsa kwa HF (Hydrofluoric Acid)

HF ndiye mankhwala othandiza kwambiri pochotsazigawo za okosijeni zachilengedwe (SiO₂)Pa ma wafer a silicon ndipo ndi yachiwiri kuposa DIW pakufunika. Imasungunulanso zitsulo zomwe zimalumikizidwa ndikuletsa kusungunuka kwa okosijeni. Komabe, kupukuta kwa HF kumatha kuwononga malo a wafer ndikuukira zitsulo zina mosafunikira. Pofuna kuthana ndi mavutowa, njira zabwino zimachepetsera HF, kuwonjezera ma oxidizer, ma surfactants, kapena zinthu zina zomangira kuti ziwonjezere kusankha ndikuchepetsa kuipitsidwa.

3. Kuyeretsa kwa SC1 (Kuyeretsa Kwachizolowezi 1: NH₄OH + H₂O₂ + H₂O)

SC1 ndi njira yotsika mtengo komanso yothandiza kwambiri yochotserazotsalira za organic, tinthu tating'onoting'ono, ndi zitsulo zina. Njirayi imaphatikiza mphamvu ya H₂O₂ ndi mphamvu ya NH₄OH yosungunuka. Imachotsanso tinthu tating'onoting'ono kudzera mu mphamvu zamagetsi, ndipo thandizo la ultrasound/megasonic limawonjezera magwiridwe antchito. Komabe, SC1 imatha kuwononga malo a wafer, zomwe zimafuna kukonza bwino ma chemical ratios, kuwongolera kupsinjika kwa pamwamba (kudzera mu ma surfactants), ndi ma chelating agents kuti achepetse kuyikanso kwa chitsulo.

4. Kuyeretsa kwa SC2 (Kuyeretsa Kwachizolowezi 2: HCl + H₂O₂ + H₂O)

SC2 imakwaniritsa SC1 pochotsazoipitsa zachitsuloMphamvu yake yolimba yopangira zinthu imasintha zitsulo zosungunuka kukhala mchere kapena zinthu zina zosungunuka, zomwe zimatsukidwa. Ngakhale kuti SC1 imagwira ntchito bwino pa zinthu zachilengedwe ndi tinthu tating'onoting'ono, SC2 ndi yofunika kwambiri popewa kuyamwa kwa zitsulo ndikuwonetsetsa kuti zitsulo sizikuipitsidwa kwambiri.

5. Kuyeretsa O₃ (Ozone)

Kuyeretsa ozoni kumagwiritsidwa ntchito makamaka pakuchotsa zinthu zachilengedwendikupha tizilombo toyambitsa matenda DIW. O₃ imagwira ntchito ngati oxidant wamphamvu, koma ingayambitse kubwereranso, kotero nthawi zambiri imaphatikizidwa ndi HF. Kukonza kutentha ndikofunikira kwambiri chifukwa kusungunuka kwa O₃ m'madzi kumachepa kutentha kwambiri. Mosiyana ndi mankhwala ophera tizilombo toyambitsa matenda okhala ndi chlorine (osavomerezeka mu zinthu zopangidwa ndi semiconductor), O₃ imawola kukhala mpweya popanda kuipitsa machitidwe a DIW.

6. Kuyeretsa Zosungunulira Zachilengedwe

Mu njira zina zapadera, zinthu zosungunulira zachilengedwe zimagwiritsidwa ntchito pamene njira zoyeretsera zokhazikika sizikwanira kapena sizili zoyenera (monga pamene kupanga okosijeni kuyenera kupewedwa).

Mapeto

Kuyeretsa mawaya ndi njira yoyeretserasitepe yobwerezedwa mobwerezabwerezapakupanga zinthu za semiconductor ndipo zimakhudza mwachindunji phindu ndi kudalirika kwa zipangizo.ma wafer akuluakulu ndi ma geometries ang'onoang'ono a chipangizo, zofunikira pa ukhondo wa pamwamba pa wafer, momwe mankhwala alili, kuuma kwake, ndi makulidwe a okosijeni zikukulirakulira.

Nkhaniyi yawunikiranso ukadaulo wotsuka wafa wokhwima komanso wapamwamba, kuphatikiza njira za DIW, HF, SC1, SC2, O₃, ndi zosungunulira zachilengedwe, pamodzi ndi njira zawo, ubwino, ndi zofooka.malingaliro azachuma ndi zachilengedwe, kusintha kosalekeza kwa ukadaulo woyeretsa wafer ndikofunikira kuti tikwaniritse zofunikira za opanga ma semiconductor apamwamba.