Ndege za Crystal ndi mawonekedwe a kristalo ndi mfundo ziwiri zazikuluzikulu mu crystallography, yogwirizana kwambiri ndi kapangidwe ka kristalo muukadaulo wophatikizika wa silicon.
1.Tanthauzo ndi Makhalidwe a Crystal Orientation
Kuwongolera kwa kristalo kumayimira njira inayake mkati mwa kristalo, yomwe nthawi zambiri imawonetsedwa ndi ma crystal orientation indices. Kuwongolera kwa kristalo kumatanthauzidwa mwa kugwirizanitsa mfundo ziwiri za lattice mkati mwa mawonekedwe a kristalo, ndipo ili ndi zizindikiro zotsatirazi: kristalo iliyonse imakhala ndi chiwerengero chopanda malire cha lattice; mawonekedwe amodzi a kristalo amatha kukhala ndi magawo angapo ofanana omwe amapanga banja loyang'ana kristalo; banja loyang'ana kristalo limakwirira nsonga zonse za kristalo.
Kufunika kwa mawonekedwe a krustalo kwagona pakuwonetsa dongosolo la maatomu mkati mwa kristalo. Mwachitsanzo, [111] mawonekedwe a kristalo amayimira mbali ina pomwe mawonedwe a ma axx atatu ogwirizanitsa ndi 1: 1: 1.
2. Tanthauzo ndi Katundu wa Crystal Planes
Ndege ya kristalo ndi ndege yamakonzedwe a atomu mkati mwa kristalo, woimiridwa ndi ma crystal plane indices (Miller indices). Mwachitsanzo, (111) akuwonetsa kuti kubwereza kwa mayendedwe a ndege ya kristalo pamagulu ogwirizanitsa ali mu chiŵerengero cha 1: 1: 1. Ndege ya kristalo ili ndi zotsatirazi: ndege iliyonse ya kristalo imakhala ndi chiwerengero chosawerengeka cha lattice; ndege iliyonse ya kristalo ili ndi chiwerengero chopanda malire cha ndege zofanana zomwe zimapanga banja la ndege ya crystal; banja la crystal ndege limaphimba kristalo yonse.
Kutsimikiza kwa ma indices a Miller kumaphatikizapo kutenga zolumikizira za ndege ya kristalo panjira iliyonse yolumikizirana, kupeza zofananira, ndikuzisintha kukhala zocheperako. Mwachitsanzo, ndege ya (111) ya crystal ili ndi zolowera pa x, y, ndi z nkhwangwa mu chiŵerengero cha 1:1:1.
3. Ubale Pakati pa Crystal Planes ndi Crystal Orientation
Ndege za kristalo ndi mawonekedwe a kristalo ndi njira ziwiri zosiyana zofotokozera mawonekedwe a geometric a kristalo. Crystal orientation imatanthawuza dongosolo la maatomu motsatira njira inayake, pomwe gulu la kristalo limatanthawuza dongosolo la maatomu pa ndege inayake. Awiriwa ali ndi makalata ena, koma amaimira malingaliro osiyana a thupi.
Ubale wofunikira: Vector yanthawi zonse ya ndege ya kristalo (ie, vector perpendicular to the ndegeyo) imagwirizana ndi mawonekedwe a kristalo. Mwachitsanzo, vekitala yowoneka bwino ya (111) kristalo ndege imafanana ndi [111] crystal orientation, kutanthauza kuti makonzedwe a atomiki motsatira njira ya [111] ndi perpendicular kwa ndegeyo.
Mumayendedwe a semiconductor, kusankha kwa ndege za kristalo kumakhudza kwambiri magwiridwe antchito a chipangizocho. Mwachitsanzo, mu silicon-based semiconductors, ndege zomwe zimagwiritsidwa ntchito kwambiri ndi (100) ndi (111) ndege chifukwa zimakhala ndi machitidwe osiyanasiyana a atomiki ndi njira zomangira mbali zosiyanasiyana. Katundu monga kuyenda kwa ma elekitironi ndi mphamvu zapamtunda zimasiyanasiyana pa ndege zosiyanasiyana zamakristalo, zomwe zimakhudza magwiridwe antchito ndi kukula kwa zida za semiconductor.
4. Mapulogalamu Othandiza mu Semiconductor Processes
Popanga silicon-based semiconductor, ma crystal orientation ndi ma crystal ndege amagwiritsidwa ntchito pazinthu zambiri:
Kukula kwa Crystal: Makhiristo a semiconductor amakula motsatira ma kristalo. Makristalo a silicon nthawi zambiri amakula motsatira [100] kapena [111] mawonekedwe chifukwa kukhazikika ndi makonzedwe a atomiki m'magawo awa ndi abwino kukula kwa kristalo.
Etching Njira: Mu etching yonyowa, ndege zosiyanasiyana zamakristalo zimakhala ndi mitengo yosiyana. Mwachitsanzo, mitengo ya etching pa ndege za (100) ndi (111) za silicon zimasiyana, zomwe zimapangitsa kuti pakhale zotsatira za anisotropic etching.
Mawonekedwe a Chipangizo: Kusuntha kwa ma elekitironi mu zida za MOSFET kumakhudzidwa ndi ndege ya kristalo. Nthawi zambiri, kuyenda kumakhala kokwera kwambiri pa ndege (100), ndichifukwa chake ma MOSFET amakono opangidwa ndi silicon amagwiritsa ntchito kwambiri (100).
Mwachidule, ndege zamakristali ndi mawonekedwe a kristalo ndi njira ziwiri zofunika zofotokozera kapangidwe ka makristasi mu crystallography. Kuwongolera kwa kristalo kumayimira mawonekedwe omwe amawongolera mkati mwa kristalo, pomwe ndege zamakristali zimafotokozera ndege zina mkati mwa kristalo. Mfundo ziwirizi ndizogwirizana kwambiri pakupanga semiconductor. Kusankhidwa kwa ndege za kristalo kumakhudza mwachindunji zinthu zakuthupi ndi zamankhwala, pomwe mawonekedwe a kristalo amakhudza kukula kwa kristalo ndi njira zosinthira. Kumvetsetsa ubale womwe ulipo pakati pa ndege zamakristali ndi momwe zimayendera ndikofunikira pakuwongolera njira zama semiconductor ndikuwongolera magwiridwe antchito a chipangizocho.
Nthawi yotumiza: Oct-08-2024