Ma Wafer a Silicon vs. Ma Wafer a Galasi: Kodi Timatsuka Chiyani Kwenikweni? Kuchokera ku Zinthu Zamtengo Wapatali Kupita ku Mayankho Oyeretsa Ochokera ku Njira

Ngakhale kuti ma wafer a silicon ndi galasi ali ndi cholinga chimodzi chofanana choyeretsedwera, mavuto ndi njira zolephera zomwe amakumana nazo poyeretsa ndizosiyana kwambiri. Kusiyana kumeneku kumabwera chifukwa cha zinthu zomwe zimapangidwa ndi silicon ndi galasi, komanso "nzeru" yosiyana yoyeretsa yomwe imayendetsedwa ndi ntchito zawo zomaliza.

Choyamba, tiyeni tifotokoze bwino: Kodi kwenikweni tikuyeretsa chiyani? Ndi zinthu ziti zodetsa zomwe zikuphatikizidwa?

Zinthu zodetsa zitha kugawidwa m'magulu anayi:

1. Zoipitsa Tinthu

   • Fumbi, tinthu tachitsulo, tinthu tachilengedwe, tinthu tomwe timayabwa (kuchokera ku njira ya CMP), ndi zina zotero.

   • Zodetsa izi zingayambitse zolakwika pamawonekedwe, monga ma shorts kapena ma open circuits.

2. Zoipitsa Zachilengedwe

   • Zimaphatikizapo zotsalira za photoresist, zowonjezera za utomoni, mafuta a khungu la anthu, zotsalira zosungunulira, ndi zina zotero.

   • Zodetsa zachilengedwe zimatha kupanga zigoba zomwe zimalepheretsa kuuma kapena kuyika ma ion ndikuchepetsa kumamatira kwa mafilimu ena owonda.

3. Zoipitsa za Ion zachitsulo

   • Iron, mkuwa, sodium, potaziyamu, calcium, ndi zina zotero, zomwe zimachokera makamaka ku zipangizo, mankhwala, ndi kukhudzana ndi anthu.

   • Mu ma semiconductors, ma ayoni achitsulo ndi zinthu "zakupha" zomwe zimayambitsa mphamvu mu bande loletsedwa, zomwe zimawonjezera mphamvu yotuluka, zimafupikitsa nthawi yonyamula, komanso zimawononga kwambiri mphamvu zamagetsi. Mu galasi, zimatha kukhudza mtundu ndi kumatirira kwa mafilimu opyapyala otsatira.

4. Gawo la Oxide la Native

   • Pa ma wafer a silicon: Chidutswa chopyapyala cha silicon dioxide (Native Oxide) chimapangika mwachilengedwe pamwamba pa mlengalenga. Kukhuthala ndi kufanana kwa chidutswa ichi cha oxide n'kovuta kuchilamulira, ndipo chiyenera kuchotsedwa kwathunthu popanga zinthu zofunika monga ma gate oxides.

   • Pa ma wafer agalasi: Galasi palokha ndi kapangidwe ka netiweki ya silica, kotero palibe vuto la "kuchotsa gawo la oxide lachilengedwe." Komabe, pamwamba pake pakhoza kukhala kuti pasinthidwa chifukwa cha kuipitsidwa, ndipo gawoli liyenera kuchotsedwa.

I. Zolinga Zazikulu: Kusiyana Pakati pa Kugwira Ntchito Kwamagetsi ndi Kukwanira Kwathupi

• Ma Wafer a Silicon

  • Cholinga chachikulu cha kuyeretsa ndikuwonetsetsa kuti magetsi akugwira ntchito bwino. Mafotokozedwe nthawi zambiri amaphatikizapo kuwerengera tinthu tating'onoting'ono ndi kukula kwake (monga tinthu tating'onoting'ono ≥0.1μm tiyenera kuchotsedwa bwino), kuchuluka kwa ayoni achitsulo (monga Fe, Cu kuyenera kulamulidwa kufika pa maatomu ≤10¹⁰/cm² kapena kutsika), ndi kuchuluka kwa zotsalira za organic. Ngakhale kuipitsidwa ndi microscopic kungayambitse kufupika kwa ma circuit, kutayikira kwa mafunde, kapena kulephera kwa gate oxide integrity.

• Ma Wafer a Galasi

  • Monga zinthu zomangira, zofunikira kwambiri ndi ungwiro wa thupi ndi kukhazikika kwa mankhwala. Mafotokozedwe amayang'ana kwambiri mbali zazikulu monga kusakhala ndi mikwingwirima, madontho osachotsedwa, komanso kusamalira kuuma kwa pamwamba ndi mawonekedwe ake. Cholinga choyeretsa makamaka ndikuwonetsetsa kuti mawonekedwe ake ndi aukhondo komanso kuti zinthuzo zikhale zolimba kwambiri pazochitika zina monga kuphimba.

II. Chilengedwe cha Zinthu: Kusiyana Koyamba Pakati pa Crystalline ndi Amorphous

• Silikoni

  • Silikoni ndi chinthu chopangidwa ndi kristalo, ndipo pamwamba pake pamakhala silicon dioxide (SiO₂) oxide wosanjikiza mwachilengedwe. Oxide wosanjikiza uwu umabweretsa chiopsezo pakugwira ntchito kwa magetsi ndipo uyenera kuchotsedwa bwino komanso mofanana.

• Galasi

  • Galasi ndi netiweki ya silica yopanda mawonekedwe. Zinthu zake zambiri zimakhala zofanana ndi silicon oxide layer ya silicon, zomwe zikutanthauza kuti imatha kudulidwa mwachangu ndi hydrofluoric acid (HF) ndipo imathanso kukokoloka kwamphamvu kwa alkali, zomwe zimapangitsa kuti pamwamba pakhale kuuma kapena kusinthika. Kusiyana kwakukulu kumeneku kumatanthauza kuti kuyeretsa kwa silicon wafer kumatha kupirira kudulidwa kopepuka komanso kolamulidwa kuti kuchotse zodetsa, pomwe kuyeretsa kwa galasi wafer kuyenera kuchitidwa mosamala kwambiri kuti kupewe kuwononga maziko.

III. Kuyerekeza kwa Mayankho Oyeretsera

Kutengera zolinga zomwe zatchulidwazi ndi mawonekedwe azinthu, njira zotsukira za silicon ndi galasi wafers zimasiyana:

• Njira Yoyeretsera Magalasi Ophikira Pang'onopang'ono

  • Pakadali pano, mafakitale ambiri opangira magalasi amagwiritsa ntchito njira zoyeretsera kutengera mawonekedwe a galasi, makamaka pogwiritsa ntchito zinthu zofewa za alkaline.

  • Makhalidwe a Wothandizira Kuyeretsa:Zotsukira zapaderazi nthawi zambiri zimakhala ndi alkaline yochepa, yokhala ndi pH pafupifupi 8-9. Nthawi zambiri zimakhala ndi ma surfactants (monga alkyl polyoxyethylene ether), zitsulo zoyeretsera (monga HEDP), ndi zinthu zothandizira kutsuka zachilengedwe, zomwe zimapangidwa kuti zisungunule ndikuwononga zinthu zachilengedwe monga mafuta ndi zala, pomwe siziwononga kwambiri galasi.

  • Kuyenda kwa Njira:Njira yoyeretsera yachizolowezi imaphatikizapo kugwiritsa ntchito mankhwala oyeretsera a alkaline ochepa kutentha kuyambira kutentha kwa chipinda mpaka 60°C, kuphatikiza ndi kuyeretsa kwa ultrasound. Pambuyo poyeretsa, ma wafer amatsukidwa kangapo ndi madzi oyera ndikuwumitsa pang'onopang'ono (monga kukweza pang'onopang'ono kapena kuumitsa ndi nthunzi ya IPA). Njirayi ikukwaniritsa bwino zofunikira za wafer yagalasi kuti ikhale yoyera komanso yoyera.

• Njira Yoyeretsera Silicon Wafer

  • Pakukonza zinthu za semiconductor, ma silicon wafer nthawi zambiri amayeretsedwa ndi RCA, yomwe ndi njira yothandiza kwambiri yoyeretsera yomwe imatha kuthana ndi mitundu yonse ya zinthu zodetsa, kuonetsetsa kuti zofunikira zamagetsi zamagetsi zamagetsi zakwaniritsidwa.

IV. Pamene Galasi Likukwaniritsa Miyezo Yapamwamba ya “Ukhondo”

Pamene ma wafer agalasi amagwiritsidwa ntchito pofunikira kuwerengera tinthu tating'onoting'ono ndi kuchuluka kwa ayoni achitsulo (monga, ngati zinthu zogwiritsidwa ntchito mu njira za semiconductor kapena pamalo abwino kwambiri oyika filimu), njira yoyeretsera yamkati singakhale yokwanira. Pankhaniyi, mfundo zoyeretsera za semiconductor zingagwiritsidwe ntchito, ndikuyambitsa njira yosinthira yoyeretsera ya RCA.

Cholinga chachikulu cha njira iyi ndi kuchepetsa ndikukonza magawo a RCA kuti agwirizane ndi mawonekedwe a galasi:

• Kuchotsa Zodetsa Zachilengedwe:Mayankho a SPM kapena madzi ofatsa a ozone angagwiritsidwe ntchito kuwononga zinthu zachilengedwe pogwiritsa ntchito okosijeni wamphamvu.

• Kuchotsa Tinthu:Mankhwala a SC1 osungunuka kwambiri amagwiritsidwa ntchito pa kutentha kochepa komanso nthawi yochepa yochizira kuti agwiritse ntchito mphamvu zake zamagetsi komanso mphamvu zake zochotsa tinthu tating'onoting'ono, pomwe akuchepetsa dzimbiri pagalasi.

• Kuchotsa Ioni ya Chitsulo:Njira yothetsera SC2 yochepetsedwa kapena njira yosavuta yothetsera hydrochloric acid/nitric acid yochepetsedwa imagwiritsidwa ntchito kuchotsa zodetsa zitsulo kudzera mu chelation.

• Zoletsa Zokhwima:DHF (di-ammonium fluoride) iyenera kupewedwa kotheratu kuti isawonongeke ndi dzimbiri la galasi.

Mu ndondomeko yonse yosinthidwa, kuphatikiza ukadaulo wa megasonic kumawonjezera kwambiri mphamvu yochotsera tinthu tating'onoting'ono tating'onoting'ono ndipo kumakhala kofatsa pamwamba.

Mapeto

Njira zotsukira ma wafer a silicon ndi galasi ndi zotsatira zosapeŵeka za reverse engineering kutengera zomwe zimagwiritsidwa ntchito pomaliza, mawonekedwe a zinthu, ndi mawonekedwe a thupi ndi mankhwala. Kutsuka ma wafer a silicon kumafuna "ukhondo wa atomiki" kuti magetsi agwire bwino ntchito, pomwe kutsuka ma wafer agalasi kumayang'ana kwambiri pakupeza malo "abwino komanso osawonongeka". Pamene ma wafer agalasi akugwiritsidwa ntchito kwambiri mu ntchito za semiconductor, njira zawo zotsukira zidzasintha mosalekeza kupitirira kutsuka kofooka kwa alkaline, ndikupanga njira zokonzedwa bwino komanso zosinthidwa monga njira ya RCA yosinthidwa kuti ikwaniritse miyezo yapamwamba yaukhondo.