Silicon Carbide Ceramics vs. Semiconductor Silicon Carbide: Zinthu Zomwezo Zomwe Zili ndi Zomwe Ziwiri Zosiyana

1. Zofunikira Zosiyanasiyana za Ukhondo pa Zida Zopangira

 

Ceramic-grade SiC ili ndi zofunikira zochepa zoyera pazakudya zake za ufa. Nthawi zambiri, zopangira zamalonda zokhala ndi 90% -98% zoyera zimatha kukwaniritsa zofunikira zambiri, ngakhale zoumba zapamwamba zowoneka bwino zingafunike 98% -99.5% chiyero (mwachitsanzo, SiC yolumikizidwa ndi SiC imafuna zowongolera za silicon zaulere). Imalekerera zonyansa zina ndipo nthawi zina imaphatikizira mwadala zida zopangira sintering monga aluminium oxide (Al₂O₃) kapena yttrium oxide (Y₂O₃) kuti ipititse patsogolo ntchito ya sintering, kutsika kutentha kwa sintering, ndikuwonjezera kuchuluka kwazinthu zomaliza.

 

Semiconductor-grade SiC imafuna milingo yoyera kwambiri. SiC yamtundu umodzi wa crystal SiC imafuna ≥99.9999% (6N) chiyero, ndi mapulogalamu ena apamwamba omwe amafunikira chiyero cha 7N (99.99999%). Ma Epitaxial layers akuyenera kukhala ndi chidetso chochepera 10¹⁶ maatomu/cm³ (makamaka kupewa zonyansa zakuya monga B, Al, ndi V). Ngakhale zonyansa monga chitsulo (Fe), aluminiyamu (Al), kapena boron (B) zimatha kukhudza kwambiri mphamvu zamagetsi poyambitsa kubalalika kwa chonyamulira, kuchepetsa mphamvu yakuwonongeka kwamunda, ndipo pamapeto pake kusokoneza magwiridwe antchito ndi kudalirika kwa chipangizocho, kufunikira kowongolera zonyansa.

 

Silicon carbide semiconductor zinthu

 

2. Mapangidwe Odziwika a Crystal ndi Ubwino

 

Ceramic-grade SiC imakhalapo ngati ufa wa polycrystalline kapena matupi a sintered opangidwa ndi ma microcrystals ambiri a SiC omwe amapangidwa mwachisawawa. Nkhaniyi ikhoza kukhala ndi ma polytypes angapo (mwachitsanzo, α-SiC, β-SiC) popanda kuwongolera mwamphamvu pamitundu ina, ndikugogomezera kuchuluka kwazinthu zonse komanso kufanana. Kapangidwe kake kamkati kamakhala ndi malire ambiri ambewu ndi ma pores ang'onoang'ono, ndipo amatha kukhala ndi zothandizira zoziziritsa kukhosi (mwachitsanzo, Al₂O₃, Y₂O₃).

 

SiC ya Semiconductor-grade iyenera kukhala gawo limodzi la kristalo kapena zigawo za epitaxial zokhala ndi makristalo opangidwa bwino kwambiri. Zimafunika ma polytypes enieni omwe amapezeka kudzera mu njira zolondola za kukula kwa kristalo (mwachitsanzo, 4H-SiC, 6H-SiC). Zida zamagetsi monga kuyenda kwa ma elekitironi ndi bandgap zimakhudzidwa kwambiri ndi kusankha kwa polytype, zomwe zimafunikira kuwongolera mwamphamvu. Pakadali pano, 4H-SiC ikulamulira msika chifukwa champhamvu zake zamagetsi kuphatikiza kusuntha konyamulira komanso kulimba kwamunda, ndikupangitsa kuti ikhale yabwino pazida zamagetsi.

 

3. Kufananiza kwa Vuto la Njira

 

Ceramic-grade SiC imagwiritsa ntchito njira zosavuta zopangira (kukonza ufa → kupanga → sintering), zofanana ndi "kupanga njerwa." Njirayi ikuphatikizapo:

 

• Kusakaniza zamalonda zamtundu wa SiC ufa (womwe nthawi zambiri umakhala wa micron) ndi zomangira
• Kupanga kudzera kukanikiza
• Kutentha kwambiri (1600-2200 ° C) kuti mukwaniritse kachulukidwe kudzera mu kufalikira kwa tinthu.
  Mapulogalamu ambiri amatha kukhutitsidwa ndi> 90% kachulukidwe. Njira yonseyi sifunika kuwongolera kukula kwa kristalo, m'malo mwake, kupanga ndi kusinthasintha kwa sintering. Ubwino wake umaphatikizapo kusinthasintha kwamapangidwe amitundu yovuta, ngakhale ndi zofunika zochepa zachiyero.

 

Semiconductor-grade SiC imaphatikizapo njira zovuta kwambiri (kukonzekera kwa ufa wapamwamba kwambiri → kukula kwa gawo limodzi la galasi → epitaxial wafer deposition → kupanga chipangizo). Njira zazikuluzikulu ndi izi:

 

• Kukonzekera kwa gawo lapansi makamaka pogwiritsa ntchito njira ya physical vapor transport (PVT).
• Kutsitsa kwa SiC ufa pazovuta kwambiri (2200-2400 ° C, vacuum yayikulu)
• Kuwongolera molondola kwa ma gradient (± 1 ° C) ndi magawo amphamvu
• Epitaxial layer kukula kudzera mu chemical vapor deposition (CVD) kuti apange zigawo zofanana, zopindika (nthawi zambiri mpaka ma microns angapo)
  Ntchito yonseyo imafuna malo aukhondo kwambiri (monga zipinda zoyera za Gulu 10) kuti apewe kuipitsidwa. Makhalidwe ake amaphatikiza kulondola kwambiri kwa njira, zomwe zimafuna kuwongolera malo otenthetsera ndi kuchuluka kwa gasi, zokhala ndi zofunika zolimba pakuyera kwazinthu zonse (> 99.9999%) komanso kukulitsa kwa zida.

 

4. Kusiyana Kwakukulu Kwa Mtengo ndi Mayendedwe Pamisika

 

SiC ya Ceramic-grade:

• Zopangira: ufa wamalonda
• Njira zosavuta
• Mtengo wotsika: Zikwi mpaka masauzande RMB pa toni
• Kugwiritsa ntchito kwakukulu: ma Abrasives, refractories, ndi mafakitale ena omwe amakhudzidwa ndi mtengo

 

Semiconductor-grade SiC mawonekedwe:

• Nthawi yayitali ya kukula kwa gawo lapansi
• Kuwongolera zolakwika
• Zokolola zochepa
• Mtengo wapamwamba: Zikwi za USD pa 6-inch gawo lapansi
• Misika yokhazikika: Zamagetsi zogwira ntchito kwambiri monga zida zamagetsi ndi zida za RF
  Ndi chitukuko chofulumira cha magalimoto amagetsi atsopano ndi mauthenga a 5G, kufunikira kwa msika kukukulirakulira.

 

5. Zosiyanasiyana Zogwiritsa Ntchito

 

Ceramic-grade SiC imagwira ntchito ngati "ogwira ntchito m'mafakitale" makamaka pazantchito zamapangidwe. Pogwiritsa ntchito makina ake abwino kwambiri (kulimba kwambiri, kukana kuvala) ndi kutentha (kutentha kwambiri, kukana kwa okosijeni), imapambana mu:

 

• Abrasives (mawilo opera, sandpaper)
• Refractories (zotentha kwambiri zamoto)
• Zovala/zosagwira dzimbiri (mapampu amadzi, zomangira mapaipi)

 

Silicon carbide ceramic zigawo zomangira

 

Semiconductor-grade SiC imagwira ntchito ngati "electronic elite," imagwiritsa ntchito mawonekedwe ake ambiri a bandgap semiconductor kuwonetsa zabwino zake pazida zamagetsi:

 

• Zipangizo zamagetsi: ma EV inverters, ma grid converters (kupititsa patsogolo kusinthika kwa mphamvu)
• Zipangizo za RF: malo oyambira a 5G, makina a radar (othandizira ma frequency apamwamba)
• Optoelectronics: Zinthu zapansi pa ma LED a buluu

 

200-millimeter SiC epitaxial wafer

 

Dimension	Ceramic-grade SiC	Semiconductor-grade SiC
Kapangidwe ka Crystal	Polycrystalline, angapo polytypes	Single crystal, mosamalitsa osankhidwa polytypes
Njira Focus	Densification ndi mawonekedwe a mawonekedwe	Ubwino wa Crystal komanso kuwongolera katundu wamagetsi
Zofunika Kuchita Patsogolo	Mphamvu zamakina, kukana dzimbiri, kukhazikika kwamafuta	Zida zamagetsi (bandgap, malo owonongeka, etc.)
Zochitika za Ntchito	Zigawo zamapangidwe, zosagwirizana ndi kuvala, zigawo zotentha kwambiri	Zida zamphamvu kwambiri, zida zothamanga kwambiri, zida za optoelectronic
Oyendetsa Mtengo	Njira kusinthasintha, zopangira mtengo	Crystal kukula mlingo, zida mwatsatanetsatane, zopangira chiyero

 

Mwachidule, kusiyana kwakukulu kumachokera ku zolinga zawo zosiyana: ceramic-grade SiC imagwiritsa ntchito "mawonekedwe (mapangidwe)" pamene SiC ya semiconductor-grade imagwiritsa ntchito "katundu (magetsi)." Zakale zimatsata makina otsika mtengo / matenthedwe, pamene chotsirizirachi chikuyimira pamwamba pa teknoloji yokonzekera zinthu monga chiyero chapamwamba, chogwiritsira ntchito kristalo chimodzi. Ngakhale kugawana mankhwala omwewo, SiC ya ceramic-grade ndi semiconductor-grade SiC imawonetsa kusiyana koonekeratu pakuyera, kapangidwe ka galasi, ndi njira zopangira - komabe zonsezi zimathandizira kwambiri pakupanga mafakitale ndi kupita patsogolo kwaukadaulo m'magawo awo.