Kuyeretsa konyowa (Wet Clean) ndi chimodzi mwa zinthu zofunika kwambiri popanga zinthu za semiconductor, zomwe cholinga chake ndi kuchotsa zinthu zosiyanasiyana zodetsa pamwamba pa wafer kuti zitsimikizire kuti njira zotsatirazi zitha kuchitika pamalo oyera.
Pamene kukula kwa zipangizo zamagetsi zamagetsi zamagetsi zamagetsi kukupitirira kuchepa ndipo zofunikira pa kulondola zikuwonjezeka, zofunikira zaukadaulo pakutsuka ma wafer zakhala zovuta kwambiri. Ngakhale tinthu tating'onoting'ono, zinthu zachilengedwe, ma ayoni achitsulo, kapena zotsalira za okosijeni pamwamba pa wafer zimatha kukhudza kwambiri magwiridwe antchito a chipangizocho, motero zimakhudza kukolola ndi kudalirika kwa zipangizo zamagetsi zamagetsi zamagetsi zamagetsi zamagetsi zamagetsi zamagetsi.
Mfundo Zazikulu Zokhudza Kutsuka Ma Wafer
Chofunika kwambiri pakutsuka wafer ndi kuchotsa bwino zinthu zosiyanasiyana zodetsa pamwamba pa wafer pogwiritsa ntchito njira zakuthupi, mankhwala, ndi zina kuti zitsimikizire kuti wafer ili ndi malo oyera oyenera kukonzedwanso pambuyo pake.
Mtundu wa Kuipitsidwa
Zinthu Zazikulu Zomwe Zimayambitsa Makhalidwe a Chipangizo
| Kuipitsidwa kwa nkhani | Zolakwika za kapangidwe
Zolakwika pakuyika ma ion
Zolakwika za kuwonongeka kwa filimu yoteteza kutentha
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| Kuipitsidwa kwa Zitsulo | Zitsulo za Alkali | Kusakhazikika kwa transistor ya MOS
Kuwonongeka/kuwonongeka kwa filimu ya oxide ya chipata
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| Zitsulo Zolemera | Kuwonjezeka kwa mphamvu ya PN yolumikizirana ndi kutayikira kwakunja
Zolakwika pakuwonongeka kwa filimu ya oxide ya chipata
Kuwonongeka kwa moyo wonse kwa onyamula ochepa
Kupanga chilema cha oxide layer defect
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| Kuipitsidwa ndi Mankhwala | Zinthu Zachilengedwe | Zolakwika pakuwonongeka kwa filimu ya oxide ya chipata
Kusintha kwa filimu ya CVD (nthawi yoyamwitsa)
Kusiyanasiyana kwa makulidwe a filimu ya oxide ya kutentha (kuchuluka kwa okosijeni)
Kupezeka kwa nkhungu (wafer, lens, galasi, chigoba, reticle)
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| Zopangira Zopanda Zachilengedwe (B, P) | Transistor ya MOS Vth imasuntha
Kusiyanasiyana kwa ma sheet a poly-silicon ndi substrate yolimba komanso yolimba
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| Maziko Osapangidwa (amines, ammonia) ndi Acids (SOx) | Kuwonongeka kwa mphamvu ya mankhwala oletsa kukana
Kupezeka kwa kuipitsidwa kwa tinthu tating'onoting'ono ndi utsi chifukwa cha kupanga mchere
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| Mafilimu achilengedwe ndi a mankhwala a oxide chifukwa cha chinyezi, mpweya | Kuwonjezeka kwa kukana kukhudzana
Kuwonongeka/kuwonongeka kwa filimu ya oxide ya chipata
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Makamaka, zolinga za njira yoyeretsera wafer ndi izi:
Kuchotsa Tinthu: Kugwiritsa ntchito njira zakuthupi kapena za mankhwala kuchotsa tinthu tating'onoting'ono tomwe talumikizidwa pamwamba pa wafer. Tinthu tating'onoting'ono timakhala tovuta kuchotsa chifukwa cha mphamvu zamagetsi zomwe zili pakati pawo ndi pamwamba pa wafer, zomwe zimafuna chithandizo chapadera.
Kuchotsa Zinthu Zachilengedwe: Zinthu zodetsa zachilengedwe monga mafuta ndi zotsalira za photoresist zimatha kumamatira pamwamba pa wafer. Zinthu zodetsa zimenezi nthawi zambiri zimachotsedwa pogwiritsa ntchito zinthu zamphamvu zooxidizing kapena zosungunulira.
Kuchotsa Ma Ioni a Chitsulo: Zotsalira za ma ion achitsulo pamwamba pa wafer zimatha kuchepetsa magwiridwe antchito amagetsi komanso kukhudza njira zotsatizana zokonzera. Chifukwa chake, njira zinazake zamankhwala zimagwiritsidwa ntchito kuchotsa ma ion awa.
Kuchotsa Okisidi: Njira zina zimafuna kuti pamwamba pa wafer pasakhale ndi zigawo za oxide, monga silicon oxide. Pazochitika zotere, zigawo za oxide zachilengedwe ziyenera kuchotsedwa panthawi yoyeretsa.
Vuto la ukadaulo woyeretsera ma wafer ndi kuchotsa bwino zinthu zodetsa popanda kuwononga pamwamba pa wafer, monga kupewa kuuma kwa pamwamba, dzimbiri, kapena kuwonongeka kwina kwakuthupi.
2. Kuyenda kwa Njira Yotsukira Ma Wafer
Njira yotsukira wafer nthawi zambiri imakhala ndi njira zingapo kuti zitsimikizire kuti zodetsa zonse zachotsedwa ndikuyeretsa bwino pamwamba.
Chithunzi: Kuyerekeza Pakati pa Kuyeretsa kwa Mtundu wa Batch ndi Kuyeretsa kwa Wafer Kamodzi
Njira yodziwika bwino yoyeretsera wafer imaphatikizapo njira zazikulu izi:
1. Kuyeretsa Pasadakhale (Kuyeretsa Pasadakhale)
Cholinga choyeretsa chisanadze ndikuchotsa zodetsa zotayirira ndi tinthu tating'onoting'ono tating'onoting'ono tomwe timatuluka pamwamba pa wafer, zomwe nthawi zambiri zimachitika kudzera mu kutsuka madzi oyeretsedwa (DI Water) ndi kuyeretsa pogwiritsa ntchito ultrasound. Madzi oyeretsedwa amatha kuchotsa tinthu tating'onoting'ono ndi zodetsa zosungunuka pamwamba pa wafer, pomwe kuyeretsa pogwiritsa ntchito ultrasound kumagwiritsa ntchito zotsatira za cavitation kuti ziswe mgwirizano pakati pa tinthu tating'onoting'ono ndi pamwamba pa wafer, zomwe zimapangitsa kuti zikhale zosavuta kuzichotsa.
2. Kuyeretsa Mankhwala
Kuyeretsa mankhwala ndi chimodzi mwa zinthu zofunika kwambiri pakutsuka ma wafer, pogwiritsa ntchito njira zothetsera mankhwala kuchotsa zinthu zachilengedwe, ma ayoni achitsulo, ndi ma oxide pamwamba pa ma wafer.
Kuchotsa Zinthu Zachilengedwe: Kawirikawiri, acetone kapena ammonia/peroxide osakaniza (SC-1) amagwiritsidwa ntchito kusungunula ndi kusakaniza zinthu zachilengedwe. Chiŵerengero chachizolowezi cha yankho la SC-1 ndi NH₄OH
₂O₂
₂O = 1:1:5, ndi kutentha kwa ntchito kwa pafupifupi 20°C.
Kuchotsa Ma Ioni a Chitsulo: Zosakaniza za nitric acid kapena hydrochloric acid/peroxide (SC-2) zimagwiritsidwa ntchito kuchotsa ma ayoni achitsulo pamwamba pa wafer. Chiŵerengero cha SC-2 yankho ndi HCl.
₂O₂
₂O = 1:1:6, ndipo kutentha kumasungidwa pafupifupi 80°C.
Kuchotsa Okisidi: Mu njira zina, kuchotsa kwa wosanjikiza wa okosidi woyambira pamwamba pa wafer ndikofunikira, komwe kumagwiritsidwa ntchito yankho la hydrofluoric acid (HF). Chiŵerengero chachizolowezi cha yankho la HF ndi HF
₂O = 1:50, ndipo ingagwiritsidwe ntchito kutentha kwa chipinda.
3. Kuyeretsa Komaliza
Pambuyo poyeretsa mankhwala, ma wafer nthawi zambiri amatsukidwa komaliza kuti atsimikizire kuti palibe zotsalira za mankhwala zomwe zimatsalira pamwamba. Kuyeretsa komaliza kumagwiritsa ntchito madzi oyeretsedwa kuti atsukidwe bwino. Kuphatikiza apo, kuyeretsa madzi a ozone (O₃/H₂O) kumagwiritsidwa ntchito kuchotsa zodetsa zilizonse zotsala pamwamba pa wafer.
4. Kuuma
Ma wafer oyeretsedwa ayenera kuumitsidwa mwachangu kuti asawononge madzi kapena kuyikanso zinthu zodetsa. Njira zodziwika bwino zoumitsira zimaphatikizapo kuumitsa ndi kutsuka nayitrogeni. Woyambayo amachotsa chinyezi pamwamba pa wafer pozungulira mofulumira kwambiri, pomwe womalizayo amaonetsetsa kuti auma kwathunthu pouzira mpweya wouma wa nayitrogeni pamwamba pa wafer.
Chodetsa
Dzina la Njira Yoyeretsera
Kufotokozera kwa Mankhwala Osakaniza
Mankhwala
| Tinthu tating'onoting'ono | Piranha (SPM) | Sulfuric acid/hydrogen peroxide/DI madzi | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide/hydrogen peroxide/madzi a DI | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| Zitsulo (osati mkuwa) | SC-2 (HPM) | Hydrochloric acid/hydrogen peroxide/DI madzi | HCl/H2O2/H2O1:1:6; 85°C |
| Piranha (SPM) | Sulfuric acid/hydrogen peroxide/DI madzi | H2SO4/H2O2/H2O3-4:1; 90°C | |
| DHF | Sakanizani hydrofluoric acid/DI madzi (sichichotsa mkuwa) | HF/H2O1:50 | |
| Zachilengedwe | Piranha (SPM) | Sulfuric acid/hydrogen peroxide/DI madzi | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide/hydrogen peroxide/madzi a DI | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| DIO3 | Ozone m'madzi opanda ayoni | Zosakaniza Zokonzedwa bwino za O3/H2O | |
| Oxide Yachilengedwe | DHF | Sungunulani hydrofluoric acid/DI madzi | HF/H2O 1:100 |
| BHF | Asidi ya hydrofluoric yokhazikika | NH4F/HF/H2O |
3. Njira Zoyeretsera Zam'madzi Zofala
1. Njira Yoyeretsera ya RCA
Njira yoyeretsera ya RCA ndi imodzi mwa njira zoyeretsera za wafer zomwe zimagwiritsidwa ntchito kwambiri mumakampani opanga ma semiconductor, zomwe zidapangidwa ndi RCA Corporation zaka zoposa 40 zapitazo. Njirayi imagwiritsidwa ntchito makamaka pochotsa zodetsa zachilengedwe ndi zinyalala za ayoni yachitsulo ndipo imatha kumalizidwa m'magawo awiri: SC-1 (Standard Clean 1) ndi SC-2 (Standard Clean 2).
Kuyeretsa kwa SC-1: Gawoli limagwiritsidwa ntchito makamaka kuchotsa zinthu zodetsa ndi tinthu tating'onoting'ono tachilengedwe. Yankho lake ndi chisakanizo cha ammonia, hydrogen peroxide, ndi madzi, zomwe zimapanga gawo lopyapyala la silicon oxide pamwamba pa wafer.
Kuyeretsa kwa SC-2: Gawoli limagwiritsidwa ntchito makamaka kuchotsa zodetsa za ayoni zachitsulo, pogwiritsa ntchito chisakanizo cha hydrochloric acid, hydrogen peroxide, ndi madzi. Limasiya gawo lochepa la passivation pamwamba pa wafer kuti lisawonongeke.
2. Njira Yoyeretsera Piranha (Kuyeretsa Piranha Etch)
Njira yoyeretsera ya Piranha ndi njira yothandiza kwambiri yochotsera zinthu zachilengedwe, pogwiritsa ntchito chisakanizo cha sulfuric acid ndi hydrogen peroxide, nthawi zambiri mu chiŵerengero cha 3:1 kapena 4:1. Chifukwa cha mphamvu yamphamvu kwambiri ya yankho ili, imatha kuchotsa zinthu zambiri zachilengedwe ndi zodetsa zouma. Njirayi imafuna kuwongolera kwambiri momwe zinthu zilili, makamaka pankhani ya kutentha ndi kuchuluka kwa madzi, kuti isawononge wafer.
Kuyeretsa kwa Ultrasound kumagwiritsa ntchito mphamvu ya cavitation yomwe imapangidwa ndi mafunde amphamvu kwambiri mumadzi kuti ichotse zodetsa pamwamba pa wafer. Poyerekeza ndi kuyeretsa kwachikhalidwe kwa Ultrasound, kuyeretsa kwa megasonic kumagwira ntchito pafupipafupi kwambiri, zomwe zimathandiza kuchotsa bwino tinthu tating'onoting'ono tosaoneka ngati micron popanda kuwononga pamwamba pa wafer.
4. Kuyeretsa Mpweya wa Ozone
Ukadaulo woyeretsa ozoni umagwiritsa ntchito mphamvu yamphamvu yopangira okosijeni ya ozoni kuti iwole ndikuchotsa zodetsa zachilengedwe pamwamba pa wafer, zomwe pamapeto pake zimasanduka carbon dioxide ndi madzi osavulaza. Njirayi siifuna kugwiritsa ntchito mankhwala okwera mtengo ndipo imayambitsa kuipitsidwa kochepa kwa chilengedwe, zomwe zimapangitsa kuti ikhale ukadaulo watsopano pantchito yoyeretsa wafer.
4. Zipangizo Zotsukira Ma Wafer
Pofuna kuonetsetsa kuti njira zotsukira za wafer zikuyenda bwino komanso zotetezeka, zipangizo zosiyanasiyana zotsukira zapamwamba zimagwiritsidwa ntchito popanga zinthu za semiconductor. Mitundu yayikulu ndi iyi:
1. Zipangizo Zotsukira Zonyowa
Zipangizo zoyeretsera zonyowa zimaphatikizapo matanki osiyanasiyana oyeretsera, matanki oyeretsera a ultrasonic, ndi zowumitsira. Zipangizozi zimaphatikiza mphamvu zamakina ndi ma reagents a mankhwala kuti zichotse zodetsa pamwamba pa wafer. Matanki oyeretsera nthawi zambiri amakhala ndi makina owongolera kutentha kuti atsimikizire kukhazikika ndi kugwira ntchito bwino kwa njira zamankhwala.
2. Zipangizo Zotsukira Mouma
Zipangizo zotsukira zouma zimaphatikizapo zotsukira za plasma, zomwe zimagwiritsa ntchito tinthu tamphamvu kwambiri mu plasma kuti zigwirizane ndi ndikuchotsa zotsalira pamwamba pa wafer. Kutsuka kwa plasma ndikoyenera makamaka pazinthu zomwe zimafuna kusunga umphumphu wa pamwamba popanda kuyika zotsalira za mankhwala.
3. Machitidwe Oyeretsera Okha
Ndi kufalikira kosalekeza kwa kupanga ma semiconductor, makina oyeretsera okha akhala chisankho chabwino kwambiri pakuyeretsa ma wafer akuluakulu. Makinawa nthawi zambiri amaphatikizapo njira zoyendetsera zokha, makina oyeretsera matanki ambiri, ndi makina owongolera molondola kuti atsimikizire zotsatira zoyeretsera zokhazikika pa wafer iliyonse.
5. Zochitika Zamtsogolo
Pamene zipangizo zamagetsi zamagetsi zikupitirira kuchepa, ukadaulo wotsuka wafer ukusintha kukhala njira zogwira mtima komanso zosawononga chilengedwe. Ukadaulo wotsuka wamtsogolo udzayang'ana kwambiri pa:
Kuchotsa Tinthu ta Sub-nanometer: Njira zamakono zoyeretsera zomwe zilipo zitha kuthana ndi tinthu ta nanometer, koma chifukwa cha kuchepa kwa kukula kwa chipangizocho, kuchotsa tinthu ta sub-nanometer kudzakhala vuto latsopano.
Kuyeretsa Kobiriwira Komanso Koyenera Kusamalira Chilengedwe: Kuchepetsa kugwiritsa ntchito mankhwala owononga chilengedwe ndi kupanga njira zoyeretsera zachilengedwe, monga kuyeretsa ozone ndi kuyeretsa kwakukulu, kudzakhala kofunika kwambiri.
Magawo Apamwamba a Makina Odzipangira Okha ndi Anzeru: Machitidwe anzeru athandiza kuyang'anira ndi kusintha magawo osiyanasiyana nthawi yeniyeni panthawi yoyeretsa, zomwe zikuwongolera bwino ntchito yoyeretsa komanso kupanga bwino.
Ukadaulo woyeretsa ma wafer, monga gawo lofunikira kwambiri popanga ma semiconductor, umagwira ntchito yofunika kwambiri pakuwonetsetsa kuti malo oyeretsera ma wafer ndi oyera kuti zinthu zichitike pambuyo pake. Kuphatikiza njira zosiyanasiyana zoyeretsera kumachotsa bwino zinthu zodetsa, zomwe zimapangitsa kuti malo oyeretsera akhale oyera pazigawo zotsatirazi. Pamene ukadaulo ukupita patsogolo, njira zoyeretsera zipitiliza kukonzedwa kuti zikwaniritse zosowa za kulondola kwambiri komanso kuchepetsa zilema pakupanga ma semiconductor.
Nthawi yotumizira: Okutobala-08-2024