Magalasi a Optical-Grade Silicon Carbide Waveguide AR: Kukonzekera kwa High-Purity Semi-Insulating Substrates

Kutengera kumbuyo kwa kusintha kwa AI, magalasi a AR pang'onopang'ono amalowa m'chidziwitso cha anthu. Monga chithunzithunzi chomwe chimasakanikirana bwino ndi dziko lenileni komanso zenizeni, magalasi a AR amasiyana ndi zida za VR polola ogwiritsa ntchito kuzindikira zithunzi zojambulidwa ndi digito komanso kuwala kwachilengedwe komwe kumapezeka nthawi imodzi. Kuti mukwaniritse magwiridwe antchito apawiri - kujambula zithunzi zowonera m'maso ndikusunga magalasi a AR opangidwa ndi optical-grade silicon carbide (SiC) amagwiritsa ntchito ma waveguide (lightguide). Kapangidwe kameneka kamathandizira kuwunikira kwathunthu kwamkati kuti atumize zithunzi, zofananira ndi kutumiza kwa fiber, monga momwe zikuwonetsera m'chithunzichi.

Nthawi zambiri, gawo limodzi la 6-inch high-purity semi-insulating gawo lapansi limatha kutulutsa magalasi awiri, pomwe gawo lapansi la mainchesi 8 limakhala ndi mapeyala 3-4. Kukhazikitsidwa kwa zida za SiC kumapereka maubwino atatu ofunikira:

1. Mlozera wapadera wa refractive (2.7): Imayatsa>80° malo owoneka bwino amitundu yonse (FOV) yokhala ndi gawo limodzi la lens, kuchotsa zinthu zakale za utawaleza zomwe zimapezeka m'mapangidwe wamba a AR.
2. Integrated tri-color (RGB) waveguide: Imalowetsa milu yamitundu yambiri, kuchepetsa kukula kwa chipangizo ndi kulemera kwake.
3. Kutentha kwapamwamba kwambiri (490 W/m·K): Kumachepetsa kuwonongeka kwa kuwala komwe kumachititsa kuti pakhale kutentha.

Zoyenera izi zayendetsa kufunikira kwakukulu kwa msika wamagalasi a AR a SiC. SiC ya optical-grade yomwe imagwiritsidwa ntchito nthawi zambiri imakhala ndi makhiristo a high-purity semi-insulating (HPSI), omwe zofunikira zake zokonzekera zimathandizira kuti pakhale ndalama zambiri. Chifukwa chake, kupanga magawo a HPSI SiC ndikofunikira kwambiri.

1. Kaphatikizidwe ka Semi-Insulating SiC Powder
Kupanga m'mafakitale nthawi zambiri kumagwiritsa ntchito kutentha kwapamwamba kwambiri (SHS), njira yomwe imafunikira kuwongolera mosamala:

• Zida zopangira: 99.999% mafuta oyera a carbon/silicon okhala ndi tinthu tating'onoting'ono ta 10-100 μm.
• Chiyero cha Crucible: Zida za graphite zimayeretsedwa ndi kutentha kwambiri kuti zichepetse kufalikira kwachitsulo.
• Kuwongolera kwamlengalenga: 6N-purity argon (yokhala ndi oyeretsa mumzere) imapondereza kuphatikizidwa kwa nayitrogeni; fufuzani mipweya ya HCl/H₂ ikhoza kuyambitsidwa kuti iwononge mankhwala a boron ndikuchepetsa nayitrogeni, ngakhale kuti ndende ya H₂ imafuna kukhathamiritsa kuti mupewe dzimbiri la graphite.
• Miyezo yazida: ng'anjo za kaphatikizidwe ziyenera kukhala ndi <10⁻⁴ Pa base vacuum, yokhala ndi ma protocol owonetsetsa kutayikira.

2. Mavuto a Kukula kwa Crystal
Kukula kwa HPSI SiC kumagawana zofunikira zoyera:

• Chakudya: 6N+-purity SiC ufa wokhala ndi B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O pansi pa malire, ndi zitsulo zochepa za alkali (Na/K).
• Makina agesi: 6N argon / hydrogen blends amathandizira kupirira.
• Zida: Mapampu a molekyulu amatsimikizira vacuum ya ultrahigh (<10⁻⁶ Pa); Kukonzekera koyambirira ndi kuyeretsa nitrogen ndikofunikira.

Zatsopano Zopangira Magawo
Poyerekeza ndi silicon, kukula kwa SiC kwanthawi yayitali komanso kupsinjika komwe kumachitika (kuyambitsa kusweka / kutsika m'mphepete) kumafuna kukonzedwa kwapamwamba:

• Kucheka kwa laser: Kumachulukitsa zokolola kuchokera pa zowotcha 30 (350 μm, ma saw wawaya) mpaka> 50 zopyapyala pa boule ya 20-mm, zomwe zimatha kupatulira 200-μm. Nthawi yokonza imatsika kuchokera pamasiku 10-15 (macheka awaya) mpaka <20 min/wafer kwa makhiristo 8-inch.

3. Mgwirizano wa Makampani

Gulu la Meta's Orion lachita upainiya wotengera mawonekedwe a SiC waveguide, zomwe zalimbikitsa ndalama za R&D. Mgwirizano waukulu ukuphatikiza:

• TankeBlue & MUDI Micro: Kukula kophatikizana kwa magalasi a AR diffractive waveguide.
• Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Strategic alliance for AI/AR supply chain integration.

Kuyerekeza kwa msika kumayerekeza magawo 500,000 a SiC-based AR pachaka pofika 2027, amadya magawo 250,000 6-inch (kapena 125,000 8-inch). Njirayi ikugogomezera kusintha kwa SiC mum'badwo wotsatira wa AR Optics.

XKH imakhazikika popereka magawo apamwamba a 4H-semi-insulating (4H-SEMI) SiC okhala ndi mainchesi makonda kuyambira 2-inchi mpaka 8-inchi, opangidwa kuti akwaniritse zofunikira pakugwiritsa ntchito mu RF, zamagetsi zamagetsi, ndi AR/VR Optics. Mphamvu zathu zikuphatikiza kuchuluka kwa voliyumu yodalirika, kusinthika kolondola (kukhuthala, kuyang'ana, kumalizitsa), komanso kukonza kwathunthu mnyumba kuyambira kukula kwa kristalo mpaka kupukuta. Kupitilira 4H-SEMI, timaperekanso mtundu wa 4H-N, 4H/6H-P-mtundu, ndi magawo a 3C-SiC, othandizira mitundu yosiyanasiyana ya semiconductor ndi optoelectronic.