Chidule:Tapanga 1550 nm insulator-based lithium tantalate waveguide ndi kutayika kwa 0.28 dB/cm ndi ring resonator quality factor ya 1.1 miliyoni. Kugwiritsiridwa ntchito kwa χ(3) kusagwirizana muzojambula zopanda mzere kwaphunziridwa. Ubwino wa lithiamu niobate pa insulator (LNoI), yomwe imawonetsa bwino kwambiri χ(2) ndi χ(3) katundu wopanda mzere komanso kutsekeka mwamphamvu chifukwa cha mawonekedwe ake a "insulator-on", zapangitsa kupita patsogolo kwaukadaulo wa waveguide wa ultrafast. ma modulators ndi ma photonics osakanikirana opanda mzere [1-3]. Kuphatikiza pa LN, lithiamu tantalate (LT) yafufuzidwanso ngati chinthu chopanda chithunzi chazithunzi. Poyerekeza ndi LN, LT ili ndi mawonekedwe owoneka bwino kwambiri komanso zenera lowonekera kwambiri [4, 5], ngakhale magawo ake owoneka bwino, monga refractive index ndi nonlinear coefficients, ndi ofanana ndi a LN [6, 7]. Chifukwa chake, LToI imadziwika ngati chida china champhamvu chamagetsi chamagetsi champhamvu champhamvu chopanda mafoto. Kuphatikiza apo, LToI ikukhala chida choyambirira pazida zosefera zamtundu wa acoustic wave (SAW), zomwe zimagwira ntchito pamaukadaulo othamanga kwambiri komanso opanda zingwe. M'nkhaniyi, zowotcha za LToI zitha kukhala zida zodziwika bwino pakugwiritsa ntchito zithunzi. Komabe, mpaka pano, zida zochepa chabe za zithunzi zochokera ku LToI zanenedwa, monga ma microdisk resonator [8] ndi electro-optic phase shifters [9]. Mu pepala ili, tikuwonetsa mawonekedwe otsika a LToI otsika kwambiri komanso momwe amagwiritsidwira ntchito mu ring resonator. Kuphatikiza apo, timapereka χ(3) mawonekedwe osagwirizana ndi LToI waveguide.
Mfundo zazikuluzikulu:
• Kupereka zowonda za 4-inchi mpaka 6-inch LToI, zowonda zamtundu wa lithiamu tantalate, zokhala ndi makulidwe apamwamba kuyambira 100 nm mpaka 1500 nm, pogwiritsa ntchito ukadaulo wapakhomo ndi njira zokhwima.
• SINOI: Zophika zopyapyala za silicon nitride zowonda kwambiri.
• SICOI: High-purity semi-insulating silicon carbide thin-film substrates ya silicon carbide photonic integrated circuits.
• LTOI: Mpikisano wamphamvu wa lithiamu niobate, zowonda-filimu za lithiamu tantalate wafers.
• LNOI: 8-inchi LNOI ikuthandizira kupanga kwakukulu kwa zinthu zazikulu zoonda kwambiri za filimu ya lithiamu niobate.
Kupanga pa Insulator Waveguides:Mu phunziroli, tidagwiritsa ntchito zowotcha za 4-inch LToI. Pamwamba pa LT wosanjikiza ndi malonda 42 ° mozungulira Y-cut LT gawo lapansi pazida za SAW, zomwe zimalumikizidwa mwachindunji ndi gawo la Si ndi 3 µm thick thermal oxide wosanjikiza, pogwiritsa ntchito njira yodulira mwanzeru. Chithunzi 1 (a) chikuwonetsa mawonekedwe apamwamba a chowotcha cha LToI, chokhala ndi makulidwe apamwamba a LT a 200 nm. Tinayesa kuuma kwa pamwamba kwa LT wosanjikiza pogwiritsa ntchito atomic force microscopy (AFM).
Chithunzi 1.(a) Mawonedwe apamwamba a chowotcha cha LToI, (b) Chithunzi cha AFM cha pamwamba pa pamwamba pa LT wosanjikiza, (c) Chithunzi cha PFM cha pamwamba pa LT wosanjikiza, (d) Chigawo chamtanda cha LToI waveguide, (e) Mawerengedwe ofunikira amtundu wa TE, ndi (f) Chithunzi cha SEM cha LToI waveguide core pamaso pa SiO2 yoyika pamwamba. Monga momwe chithunzi 1 (b) chikusonyezera, kuuma kwa pamwamba kumakhala kochepa kuposa 1 nm, ndipo palibe mizere yokanda yomwe inawonedwa. Kuphatikiza apo, tidawunikanso momwe ma polarization amtundu wapamwamba wa LT amagwiritsa ntchito piezoelectric response force microscopy (PFM), monga akuwonetsera Chithunzi 1 (c). Tinatsimikizira kuti polarization ya yunifolomu idasungidwa ngakhale pambuyo pa mgwirizano.
Pogwiritsa ntchito gawo laling'ono la LToI, tidapanga ma waveguide motere. Choyamba, chigoba chachitsulo chinayikidwa kuti chiwume chotsatira cha LT. Kenako, electron beam (EB) lithography idapangidwa kuti ifotokoze mawonekedwe amtundu wa waveguide pamwamba pa wosanjikiza wachitsulo. Kenako, tidasamutsa chitsanzo cha EB chokanira kukhala chosanjikiza chachitsulo chachitsulo pogwiritsa ntchito etching youma. Pambuyo pake, maziko a LToI waveguide adapangidwa pogwiritsa ntchito electron cyclotron resonance (ECR) plasma etching. Potsirizira pake, chigoba chachitsulo chachitsulo chinachotsedwa kupyolera mu njira yonyowa, ndipo chophimba cha SiO2 chinayikidwa pogwiritsa ntchito plasma-enhanced chemical vapor deposition. Chithunzi 1 (d) chikuwonetsa gawo lachiwonetsero cha LToI waveguide. Kutalika konse kwapakati, kutalika kwa mbale, ndi m'lifupi mwake ndi 200 nm, 100 nm, ndi 1000 nm, motsatana. Dziwani kuti m'lifupi mwake mumakula mpaka 3 µm m'mphepete mwa waveguide kuti mulumikizane ndi fiber.
Chithunzi 1 (e) chikuwonetsa kugawika kwamphamvu kwamagetsi amagetsi (TE) ku 1550 nm. Chithunzi 1 (f) chikuwonetsa chithunzi cha scanning electron microscope (SEM) cha LToI waveguide core pamaso pa SiO2 pamwamba pake.
Makhalidwe a Waveguide:Tidayesa koyamba zotayika zofananira polowetsa kuwala kwa TE-polarized kuchokera ku 1550 nm wavelength yokulitsa zodziwikiratu zotulutsa mu LToI ma waveguides a utali wosiyanasiyana. Kutayika kwa kufalitsa kunapezedwa kuchokera kumtunda wa ubale pakati pa kutalika kwa waveguide ndi kufalikira pa utali uliwonse. Zowonongeka zofalitsa zoyezera zinali 0.32, 0.28, ndi 0.26 dB / masentimita pa 1530, 1550, ndi 1570 nm, motero, monga momwe tawonetsera pa Chithunzi 2 (a). Mafunde a LToI opangidwa adawonetsa magwiridwe antchito otsika pang'ono ndi ma waveguides apamwamba kwambiri a LNoI [10].
Kenaka, tinayesa χ (3) kusagwirizana ndi kutembenuka kwa wavelength komwe kumapangidwa ndi njira yosakanikirana ndi mafunde anayi. Timayika pampu yowunikira mosalekeza pa 1550.0 nm ndi kuwala kwa chizindikiro pa 1550.6 nm kukhala 12 mm kutalika kwa mafunde. Monga momwe tawonetsera pa Chithunzi 2 (b), mphamvu yamagetsi yamagetsi ya phase-conjugate (idler) ikuwonjezeka ndi mphamvu yowonjezera yowonjezera. Zomwe zili mu Chithunzi 2 (b) zikuwonetsa kuchuluka kwa kusakanikirana kwa mafunde anayi. Kuchokera paubwenzi wapakati pa mphamvu zolowetsa ndi kutembenuka mtima, tinayerekeza chizindikiro cha nonlinear (γ) kukhala pafupifupi 11 W^ -1m.
Chithunzi 3.(a) Chithunzi cha microscope cha cholumikizira mphete chopangidwa. (b) Kutumiza mawonekedwe a mphete ya resonator yokhala ndi magawo osiyanasiyana apakati. (c) Kuyezedwa ndi Lorentzian-zokwanira kufalitsa sipekitiramu wa mphete resonator ndi kusiyana kwa 1000 nm.
Kenako, tidapanga cholumikizira mphete cha LToI ndikuwunika mawonekedwe ake. Chithunzi 3 (a) chikuwonetsa chithunzi cha microscope chopangidwa ndi mphete yopangidwa. Mphete ya resonator imakhala ndi kasinthidwe ka "racetrack", yokhala ndi dera lopindika lomwe lili ndi utali wa 100 µm ndi gawo lolunjika la 100 µm m'litali. Kuchuluka kwa kusiyana pakati pa mphete ndi phata la mafunde a basi kumasiyana mowonjezereka kwa 200 nm, makamaka pa 800, 1000, ndi 1200 nm. Chithunzi 3 (b) chikuwonetsa mawonekedwe opatsirana pampata uliwonse, kuwonetsa kuti chiŵerengero cha kutha chimasintha ndi kukula kwa kusiyana. Kuchokera paziwonetserozi, tidatsimikiza kuti kusiyana kwa 1000 nm kumapereka zovuta zolumikizana, chifukwa zikuwonetsa chiŵerengero chapamwamba kwambiri cha -26 dB.
Pogwiritsa ntchito resonator yolumikizana kwambiri, tidayerekeza mtundu wa chinthu (Q factor) polumikiza mawonekedwe opatsirana ndi mzere wa Lorentzian, kupeza gawo lamkati la Q la 1.1 miliyoni, monga momwe chithunzi 3 (c). Kudziwa kwathu, ichi ndi chiwonetsero choyamba cha ma waveguide-ophatikizana LToI ring resonator. Makamaka, mtengo wa Q factor womwe tidapeza ndiwokwera kwambiri kuposa wa fiber-coupled LToI microdisk resonators [9].
Pomaliza:Tinapanga LToI waveguide ndi kutayika kwa 0.28 dB / cm pa 1550 nm ndi mphete ya resonator Q factor ya 1.1 miliyoni. Ntchito zomwe zapezedwa zikufanana ndi zomwe zatsika kwambiri za LNoI waveguides. Kuphatikiza apo, tidafufuza za χ(3) kusagwirizana kwa LToI waveguide yopangira pa-chip nonlinear application.
Nthawi yotumiza: Nov-20-2024