Kuyambira m'ma 1980, kuchuluka kwa magetsi olumikizirana kwakhala kukukwera pamlingo wa 1.5× kapena mwachangu pachaka. Kuphatikiza kwakukulu kumabweretsa kuchuluka kwa magetsi ndi kupanga kutentha panthawi yogwira ntchito.Ngati sizingatayike bwino, kutentha kumeneku kungayambitse kulephera kwa kutentha ndikuchepetsa nthawi ya moyo wa zida zamagetsi.
Pofuna kukwaniritsa zosowa zomwe zikukwera zoyendetsera kutentha, zipangizo zamakono zopangira ma CD zomwe zimakhala ndi mphamvu yoyendetsera kutentha bwino zikufufuzidwa kwambiri ndikukonzedwa bwino.
Zinthu zopangidwa ndi diamondi/mkuwa
01 Daimondi ndi Mkuwa
Zipangizo zomangira zachikhalidwe zimaphatikizapo ziwiya zadothi, mapulasitiki, zitsulo, ndi zinthu zina zomwe zimagwiritsidwa ntchito popanga zinthu. Ziwiya zadothi monga BeO ndi AlN zimawonetsa ma CTE ofanana ndi ma semiconductor, kukhazikika kwa mankhwala, komanso kutentha pang'ono. Komabe, kukonza kwawo kovuta, mtengo wake wokwera (makamaka BeO woopsa), komanso kufooka kwake kumachepetsa kugwiritsa ntchito. Kupaka pulasitiki kumapereka mtengo wotsika, kulemera kopepuka, komanso kutchinjiriza koma kumakhala ndi kutentha kochepa komanso kutentha kwambiri. Zitsulo zoyera (Cu, Ag, Al) zimakhala ndi kutentha kwambiri koma CTE yochulukirapo, pomwe ziwiya zadothi (Cu-W, Cu-Mo) zimasokoneza magwiridwe antchito a kutentha. Chifukwa chake, zinthu zatsopano zomangira zomwe zimayang'anira kutentha kwambiri komanso CTE yabwino ndizofunikira kwambiri.
| Kulimbikitsa | Kutentha kwa Matenthedwe (W/(m·K)) | CTE (×10⁻⁶/℃) | Kuchulukana (g/cm³) |
| Daimondi | 700–2000 | 0.9–1.7 | 3.52 |
| Tinthu ta BeO | 300 | 4.1 | 3.01 |
| Tinthu ta AlN | 150–250 | 2.69 | 3.26 |
| Tinthu ta SiC | 80–200 | 4.0 | 3.21 |
| Tinthu ta B₄C | 29–67 | 4.4 | 2.52 |
| Ulusi wa Boron | 40 | ~5.0 | 2.6 |
| Tinthu ta TiC | 40 | 7.4 | 4.92 |
| Al₂O₃ tinthu | 20–40 | 4.4 | 3.98 |
| Ndevu za SiC | 32 | 3.4 | – |
| Tinthu ta Si₃N₄ | 28 | 1.44 | 3.18 |
| Tinthu ta TiB₂ | 25 | 4.6 | 4.5 |
| Tinthu ta SiO₂ | 1.4 | <1.0 | 2.65 |
Daimondi, chinthu chachilengedwe chodziwika bwino kwambiri (Mohs 10), chilinso ndi zinthu zapaderakutentha kopitilira muyeso (200–2200 W/(m·K)).
Ufa wa diamondi wochepa
Mkuwa, ndi kutentha/magetsi okwera kwambiri (401 W/(m·K)), kusinthasintha, komanso kugwiritsa ntchito bwino ndalama, zimagwiritsidwa ntchito kwambiri mu ma IC.
Kuphatikiza makhalidwe awa,diamondi/mkuwa (Dia/Cu) zophatikiza—ndi Cu ngati matrix ndi diamondi ngati reinforcement—zikuonekera ngati zipangizo zoyendetsera kutentha kwa m'badwo wotsatira.
02 Njira Zopangira Zinthu Zofunika
Njira zodziwika bwino zopangira diamondi/mkuwa ndi izi: ufa wa zitsulo, kutentha kwambiri komanso kuthamanga kwambiri, kusungunula madzi, kutulutsa madzi mu plasma, kupopera madzi ozizira, ndi zina zotero.
Kuyerekeza njira zosiyanasiyana zokonzekera, njira ndi makhalidwe a zinthu zopangidwa ndi diamondi/mkuwa zokhala ndi tinthu tating'onoting'ono tating'onoting'ono
| Chizindikiro | Ufa wa zitsulo | Kukanikiza Kotentha kwa Vacuum | Kutulutsa Madzi a Plasma (SPS) | Kutentha Kwambiri (HPHT) | Kutaya kwa Utsi Wozizira | Kusungunuka kwa Madzi |
| Mtundu wa Daimondi | MBD8 | HFD-D | MBD8 | MBD4 | PDA | MBD8/HHD |
| Matrix | Ufa wa 99.8% Cu | 99.9% electrolytic Cu ufa | 99.9% Cu ufa | Aloyi/ufa wa Cu woyera | Ufa wa Cu woyera | Pure Cu bulk/ndodo |
| Kusintha kwa Mawonekedwe | – | – | – | B, Ti, Si, Cr, Zr, W, Mo | – | – |
| Kukula kwa Tinthu (μm) | 100 | 106–125 | 100–400 | 20–200 | 35–200 | 50–400 |
| Gawo la Voliyumu (%) | 20–60 | 40–60 | 35–60 | 60–90 | 20–40 | 60–65 |
| Kutentha (°C) | 900 | 800–1050 | 880–950 | 1100–1300 | 350 | 1100–1300 |
| Kupanikizika (MPa) | 110 | 70 | 40–50 | 8000 | 3 | 1–4 |
| Nthawi (mphindi) | 60 | 60–180 | 20 | 6–10 | – | 5–30 |
| Kuchulukana kwachibale (%) | 98.5 | 99.2–99.7 | – | – | – | 99.4–99.7 |
| Magwiridwe antchito | ||||||
| Kutentha Koyenera Kwambiri (W/(m·K)) | 305 | 536 | 687 | 907 | – | 943 |
Njira zodziwika bwino za Dia/Cu zimaphatikizapo:
(1)Ufa wa zitsulo
Ufa wosakaniza wa diamondi/Cu umapindidwa ndi kupakidwa utoto. Ngakhale kuti ndi wotchipa komanso wosavuta, njira iyi imapereka kuchuluka kochepa, kapangidwe kakang'ono kosagwirizana, komanso kukula kochepa kwa zitsanzo.
Sgawo lolumikizira
(1)Kutentha Kwambiri (HPHT)
Pogwiritsa ntchito makina osindikizira amitundu yambiri, Cu yosungunuka imalowa m'makoma a diamondi pansi pa mikhalidwe yovuta kwambiri, ndikupanga zinthu zokhuthala. Komabe, HPHT imafuna nkhungu zokwera mtengo ndipo siyoyenera kupanga zinthu zambiri.
Ckukanikiza kwa ubic
(1)Kusungunuka kwa Madzi
Molten Cu imalowa mu diamond preforms kudzera mu kulowa kwa pressure-helped or capillary-driven infiltration. Zosakaniza zomwe zimatuluka zimakhala ndi >446 W/(m·K) thermal conductivity.
(2)Kutulutsa Madzi a Plasma (SPS)
Mphamvu yamagetsi yothamanga imasungunula ufa wosakaniza mofulumira ikapanikizika. Ngakhale kuti imagwira ntchito bwino, magwiridwe antchito a SPS amachepa pa diamondi fractions >65 vol%.
Chithunzi chojambula cha dongosolo loyeretsera madzi m'magazi
(5) Kuthira Utsi Wozizira
Ufa umafulumizitsidwa ndikuyikidwa pa zinthu zoyambira. Njira yatsopanoyi ikukumana ndi zovuta pakulamulira kutsirizika kwa pamwamba ndi kutsimikizira magwiridwe antchito a kutentha.
03 Kusintha kwa Mawonekedwe
Pokonzekera zinthu zopangidwa ndi zinthu zosiyanasiyana, kunyowetsa pakati pa zinthu ziwiri ndikofunikira kwambiri pakupanga zinthu zosiyanasiyana komanso chinthu chofunikira kwambiri chomwe chimakhudza kapangidwe kake komanso momwe zimagwirizanirana. Kusanyowetsa pakati pa diamondi ndi Cu kumapangitsa kuti kutentha kwa zinthu zosiyanasiyana kukhale kolimba kwambiri. Chifukwa chake, ndikofunikira kwambiri kuchita kafukufuku wosintha momwe zinthu zilili pakati pa zinthu ziwirizi kudzera m'njira zosiyanasiyana zaukadaulo. Pakadali pano, pali njira ziwiri zowongolera vuto la kulumikizana pakati pa diamondi ndi Cu matrix: (1) Kusintha kwa pamwamba pa diamondi; (2) Kukonza matrix a mkuwa pogwiritsa ntchito alloying.
Chithunzi chosinthira: (a) Kuyika molunjika pamwamba pa diamondi; (b) Kuyika matrix
(1) Kusintha pamwamba pa diamondi
Kuyika zinthu zogwira ntchito monga Mo, Ti, W ndi Cr pamwamba pa gawo lolimbitsa kumatha kusintha mawonekedwe a diamondi, motero kumawonjezera kutentha kwake. Kupaka utoto kungathandize zinthu zomwe zili pamwambapa kuti zigwirizane ndi kaboni pamwamba pa ufa wa diamondi kuti apange gawo losinthira la carbide. Izi zimapangitsa kuti kunyowa pakati pa diamondi ndi maziko achitsulo kukhale bwino, ndipo chophimbacho chingalepheretse kapangidwe ka diamondi kusintha kutentha kwambiri.
(2) Kuyika mkuwa m'malo mwake
Asanayambe kukonza zinthu zophatikizika, njira yopangira zinthu zophatikizika imachitika pa mkuwa wachitsulo, womwe ungapangitse zinthu zophatikizika zomwe nthawi zambiri zimakhala ndi kutentha kwambiri. Kuyika zinthu zogwira ntchito mu mkuwa sikungochepetsa bwino Ngongole yonyowa pakati pa diamondi ndi mkuwa, komanso kupanga gawo la carbide lomwe limasungunuka bwino mu mkuwa pa diamondi / Cu interface pambuyo pa reaction. Mwanjira imeneyi, mipata yambiri yomwe ilipo pa chipangizocho imasinthidwa ndikudzazidwa, motero kumawonjezera kutentha.
04 Mapeto
Zipangizo zomangira zachikhalidwe sizigwira ntchito bwino posamalira kutentha kuchokera ku ma chips apamwamba. Ma composites a Dia/Cu, okhala ndi CTE yosinthika komanso kutentha kwambiri, ndi njira yosinthira zamagetsi za m'badwo wotsatira.
Monga kampani yapamwamba yophatikiza mafakitale ndi malonda, XKH imayang'ana kwambiri pa kafukufuku ndi chitukuko ndi kupanga zinthu zopangidwa ndi diamondi/mkuwa ndi zinthu zopangidwa ndi chitsulo monga SiC/Al ndi Gr/Cu, zomwe zimapereka njira zatsopano zoyendetsera kutentha zomwe zimapangitsa kuti kutentha kupitirire 900W/(m·K) pa ntchito zonyamula zinthu zamagetsi, ma module amphamvu komanso ndege.
XKH'Zinthu zopangidwa ndi laminate zopangidwa ndi mkuwa wa diamondi:
Nthawi yotumizira: Meyi-12-2025