Kumvetsetsa Kwakuya kwa SPC System mu Wafer Manufacturing

1. Chidule cha SPC System

SPC ndi njira yomwe imagwiritsa ntchito njira zowerengera powunika ndikuwongolera njira zopangira. Ntchito yake yayikulu ndikuzindikira zolakwika pakupanga posonkhanitsa ndikusanthula zenizeni zenizeni, kuthandiza mainjiniya kupanga zosintha ndi zisankho panthawi yake. Cholinga cha SPC ndikuchepetsa kusiyanasiyana pakupanga, kuwonetsetsa kuti zogulitsa zimakhala zokhazikika komanso zimakwaniritsa zofunikira.

SPC imagwiritsidwa ntchito polemba njira:

Yang'anirani zida zofunika kwambiri (mwachitsanzo, kuchuluka kwa etch, mphamvu ya RF, kuthamanga kwa chipinda, kutentha, ndi zina)

Unikani zizindikiro zazikulu zamtundu wazinthu (mwachitsanzo, kukula kwa mzere, kuya kwa ma etch, kukhwimitsa m'mphepete, ndi zina zotero)

Poyang'anira magawowa, mainjiniya amatha kuzindikira zomwe zikuwonetsa kuwonongeka kwa zida kapena kusokonekera pakupanga, motero amachepetsa mitengo ya zida.

2. Zigawo Zoyambira za SPC System

Dongosolo la SPC limapangidwa ndi ma module angapo ofunikira:

Module Yosonkhanitsira Deta: Imasonkhanitsa zidziwitso zenizeni kuchokera ku zida ndi kayendetsedwe kazinthu (mwachitsanzo, kudzera mu FDC, EES machitidwe) ndikulemba magawo ofunikira ndi zotsatira zopanga.

Control Chart Module: Imagwiritsa ntchito matchati owongolera ziwerengero (monga tchati cha X-Bar, tchati cha R, tchati cha Cp/Cpk) kuti muwone kukhazikika kwadongosolo ndikuthandizira kudziwa ngati njirayo ikuwongolera.

Dongosolo la Alamu: Imayambitsa ma alarm pamene magawo ovuta apitilira malire kapena kuwonetsa kusintha kwazomwe zikuchitika, zomwe zimapangitsa mainjiniya kuchitapo kanthu.

Kusanthula ndi Kupereka Lipoti: Imasanthula zomwe zimayambitsa zolakwika kutengera ma chart a SPC ndikupanga malipoti ogwirira ntchito pamachitidwe ndi zida.

3. Kufotokozera Mwatsatanetsatane Ma chart a Control mu SPC

Ma chart owongolera ndi chimodzi mwa zida zomwe zimagwiritsidwa ntchito kwambiri mu SPC, zomwe zimathandiza kusiyanitsa pakati pa "kusintha kwabwinobwino" (komwe kumabwera chifukwa cha kusintha kwachilengedwe) ndi "kusiyana kwachilendo" (kumachitika chifukwa cha kulephera kwa zida kapena kusinthika kwazinthu). Ma chart odziwika bwino amaphatikiza:

X-Bar ndi R Charts: Amagwiritsidwa ntchito kuyang'anira tanthauzo ndi kuchuluka kwa magulu opanga kuti muwone ngati njirayo ili yokhazikika.

Ma Indices a Cp ndi Cpk: Amagwiritsidwa ntchito kuyeza kuthekera kwa njira, mwachitsanzo, ngati zotulutsa zimatha kukwaniritsa zofunikira. Cp imayesa kuthekera kothekera, pomwe Cpk imayang'ana kupatuka kwa malo opangira zinthu kuchokera kumalire atsatanetsatane.

Mwachitsanzo, pakupanga etching, mutha kuyang'anira magawo ngati etch rate ndi kuuma kwa pamwamba. Ngati chiwongolero cha chipangizo china chikuposa malire owongolera, mutha kugwiritsa ntchito ma chart owongolera kuti muwone ngati izi ndikusintha kwachilengedwe kapena zikuwonetsa kuti zida sizikuyenda bwino.

4. Kugwiritsa ntchito SPC mu Etching Equipment

Pakuwongolera, kuwongolera zida ndizofunikira, ndipo SPC imathandizira kukonza bata m'njira zotsatirazi:

Equipment Condition Monitoring: Machitidwe ngati FDC amasonkhanitsa zenizeni zenizeni pazida zazikulu za etching (monga mphamvu ya RF, kuyenda kwa gasi) ndikuphatikiza izi ndi ma chart owongolera a SPC kuti azindikire zovuta za zida. Mwachitsanzo, ngati muwona kuti mphamvu ya RF pa tchati chowongolera ikuchoka pang'onopang'ono pamtengo womwe wakhazikitsidwa, mutha kuchitapo kanthu mwachangu kuti musinthe kapena kukonza kuti musasokoneze mtundu wazinthu.

Kuyang'anira Katundu Wazinthu: Mutha kuyikanso magawo amtundu wazinthu zazikulu (mwachitsanzo, kuya kwa etch, kufalikira kwa mzere) mu dongosolo la SPC kuti muwone kukhazikika kwawo. Ngati zizindikiro zina zovuta zamagulu zimachoka pang'onopang'ono pazomwe mukufuna, dongosolo la SPC lidzatulutsa alamu, kusonyeza kuti kusintha kwa ndondomeko kumafunika.

Preventive Maintenance (PM): SPC ikhoza kuthandizira kukhathamiritsa njira yodzitetezera pazida. Mwa kusanthula deta yanthawi yayitali pakugwiritsa ntchito zida ndi zotsatira zake, mutha kudziwa nthawi yoyenera kukonza zida. Mwachitsanzo, poyang'anira mphamvu ya RF ndi ESC moyo, mukhoza kudziwa pamene kuyeretsa kapena chigawo chimodzi chofunika m'malo, kuchepetsa kulephera kwa zida ndi kutsika kwa nthawi yopanga.

5. Malangizo Ogwiritsira Ntchito Tsiku ndi Tsiku pa SPC System

Mukamagwiritsa ntchito SPC pazochitika zatsiku ndi tsiku, zotsatirazi zitha kutsatiridwa:

Tanthauzirani Ma Parameter Ofunika Kwambiri (KPI): Dziwani magawo ofunikira kwambiri popanga ndikuphatikiza pakuwunika kwa SPC. Zosinthazi ziyenera kukhala zogwirizana kwambiri ndi mtundu wazinthu komanso magwiridwe antchito a zida.

Khazikitsani Malire Owongolera ndi Malire a Alamu: Kutengera zomwe zidachitika kale komanso zofunikira pakukonza, ikani malire owongolera ndi ma alarm pagawo lililonse. Malire olamulira nthawi zambiri amaikidwa pa ± 3σ (zosiyana zosiyana), pamene malire a alamu amachokera ku zochitika zenizeni za ndondomeko ndi zipangizo.

Kuyang'anira ndi Kusanthula Mosalekeza: Yang'anani pafupipafupi ma chart owongolera a SPC kuti mufufuze zomwe zikuchitika komanso kusiyanasiyana kwa data. Ngati magawo ena adutsa malire owongolera, ndikofunikira kuchitapo kanthu mwachangu, monga kusintha magawo a zida kapena kukonza zida.

Kusamalira Zosazolowereka ndi Kusanthula Zoyambitsa Mizu: Kukachitika zachilendo, dongosolo la SPC limalemba mwatsatanetsatane za zomwe zidachitika. Muyenera kuthana ndi vuto ndikusanthula chomwe chimayambitsa vutoli potengera chidziwitsochi. Nthawi zambiri zimakhala zotheka kuphatikiza deta kuchokera ku machitidwe a FDC, machitidwe a EES, ndi zina zotero, kuti mufufuze ngati nkhaniyi ili chifukwa cha kulephera kwa zipangizo, kusokonezeka kwa ndondomeko, kapena zochitika zakunja za chilengedwe.

Kupititsa patsogolo Kupititsa patsogolo: Pogwiritsa ntchito mbiri yakale yolembedwa ndi dongosolo la SPC, zindikirani zofooka mu ndondomekoyi ndikukonzekera mapulani opititsa patsogolo. Mwachitsanzo, pokonza ma etching, pendani momwe ESC imakhudzira moyo ndi njira zoyeretsera pamayendedwe okonza zida ndikuwonjezera mosalekeza magawo ogwiritsira ntchito zida.

6. Mlandu Wothandizira Wogwiritsa Ntchito

Monga chitsanzo chothandiza, tiyerekeze kuti muli ndi udindo wopanga zida za E-MAX, ndipo cathode yachipinda ikukumana ndi nthawi yovala msanga, zomwe zimabweretsa kuwonjezeka kwa D0 (BARC defect). Poyang'anira mphamvu ya RF ndi kuchuluka kwa ma etch kudzera pa SPC system, mumazindikira momwe magawowa amapatuka pang'onopang'ono pamakhalidwe awo. Pambuyo poyambitsa alamu ya SPC, mumagwirizanitsa deta kuchokera ku dongosolo la FDC ndikuzindikira kuti nkhaniyi imayambitsidwa ndi kutentha kosasunthika mkati mwa chipinda. Kenako mumagwiritsa ntchito njira zatsopano zoyeretsera ndi kukonzanso, ndikuchepetsa mtengo wa D0 kuchoka pa 4.3 mpaka 2.4, potero mumakweza zinthu zabwino.

7.Mu XINKEHUI mutha kupeza.

Ku XINKEHUI, mutha kukwaniritsa chofufumitsa chabwino kwambiri, kaya ndi chowotcha cha silicon kapena chowotcha cha SiC. Timagwira ntchito mwaukadaulo popereka zowotcha zapamwamba kwambiri zamafakitale osiyanasiyana, kuyang'ana kulondola komanso magwiridwe antchito.