Ma conductive ndi semi-insulated silicon carbide gawo lapansi ntchito

p1

Gawo laling'ono la silicon carbide limagawidwa m'mitundu yotsekera komanso mtundu wa conductive. Pakalipano, zodziwika bwino za semi-insulated silicon carbide gawo lapansi ndi mainchesi 4. Pamsika wa conductive wa silicon carbide, zomwe zilipo pakali pano ndi mainchesi 6.

Chifukwa cha kutsika kwa ntchito m'munda wa RF, magawo a SiC osatsekeredwa ndi zida za epitaxial zitha kulamulidwa ndi dipatimenti ya Zamalonda ku US. Semi-insulated SiC monga gawo lapansi ndiye chinthu chomwe chimakondedwa kwambiri ndi GaN heteroepitaxy ndipo chili ndi chiyembekezo chogwiritsa ntchito mugawo la microwave. Poyerekeza ndi kusagwirizana kwa kristalo wa safiro 14% ndi Si 16.9%, kusagwirizana kwa kristalo kwa zinthu za SiC ndi GaN ndi 3.4% yokha. Kuphatikizidwa ndi ultra-high matenthedwe conductivity ya SiC, The mkulu mphamvu mphamvu LED ndi GaN mkulu ma frequency ndi mkulu mphamvu microwave zipangizo zokonzedwa ndi izo ali ndi ubwino waukulu mu radar, mkulu mphamvu microwave zipangizo ndi 5G njira kulankhulana.

Kafukufuku ndi kakulidwe ka gawo laling'ono la SiC lopangidwa ndi semi-insulated lakhala likuyang'ana kwambiri pa kafukufuku ndi chitukuko cha gawo limodzi la kristalo la SiC. Pali zovuta ziwiri zazikulu pakukulitsa zida za SiC zotetezedwa ndi theka:

1) Chepetsani zodetsa za opereka za N zomwe zimayambitsidwa ndi graphite crucible, kutsekemera kwamafuta otsekemera ndi doping mu ufa;

2) Kuwonetsetsa kuti kristaloyo ndi yabwino komanso magetsi, malo ozama amayambitsidwa kuti athe kubweza zotsalira zotsalira zotsalira ndi magetsi.

Pakalipano, opanga omwe ali ndi mphamvu yopangira theka-insulated SiC makamaka SICC Co, Semisic Crystal Co, Tanke Blue Co, Hebei Synlight Crystal Co., Ltd.

p2

The conductive SiC crystal imatheka pobaya nayitrogeni mumlengalenga womwe ukukulirakulira. Conductive silicon carbide gawo lapansi makamaka ntchito kupanga zipangizo mphamvu, pakachitsulo carbide zipangizo mphamvu ndi voteji mkulu, mkulu panopa, kutentha, pafupipafupi, otsika imfa ndi ubwino wina wapadera, adzakhala bwino kwambiri ntchito alipo silicon zochokera mphamvu zipangizo mphamvu. kutembenuka kwamphamvu, kumakhala ndi mphamvu yayikulu komanso yotalikirapo pamunda wa kutembenuka kwamphamvu kwamphamvu. Malo ogwiritsira ntchito kwambiri ndi magalimoto amagetsi / milu yolipiritsa, mphamvu zatsopano za photovoltaic, mayendedwe a njanji, gridi yanzeru ndi zina zotero. Chifukwa kutsika kwa zinthu zopangira magetsi kumakhala zida zamagetsi zamagalimoto amagetsi, ma photovoltaic ndi magawo ena, chiyembekezo chakugwiritsa ntchito ndi chokulirapo, ndipo opanga ndi ochulukirapo.

p3

Silicon carbide crystal mtundu: Kapangidwe kabwino ka 4H crystalline silicon carbide imatha kugawidwa m'magulu awiri, imodzi ndi mtundu wa silicon carbide crystal wamtundu wa sphalerite, wotchedwa 3C-SiC kapena β-SiC, ndipo winayo ndi hexagonal. kapena mawonekedwe a diamondi a nthawi yayitali, yomwe imakhala ya 6H-SiC, 4H-sic, 15R-SiC, etc., yomwe imadziwika kuti α-SiC. 3C-SiC ili ndi mwayi wotsutsana kwambiri ndi zida zopangira. Komabe, kusagwirizana kwakukulu pakati pa Si ndi SiC lattice constants ndi coefficients yowonjezera kutentha kungayambitse chiwerengero chachikulu cha zolakwika mu 3C-SiC epitaxial layer. 4H-SiC ili ndi kuthekera kwakukulu pakupanga ma MOSFET, chifukwa kukula kwake kwa kristalo ndi njira zokulirapo za epitaxial ndi zabwino kwambiri, komanso kusuntha kwa ma elekitironi, 4H-SiC ndi yapamwamba kuposa 3C-SiC ndi 6H-SiC, yopereka mawonekedwe abwino a microwave kwa 4H. -SiC MOSFETs.

Ngati pali kuphwanya, kukhudzana kufufuta


Nthawi yotumiza: Jul-16-2024