Kufotokozera Mwachidule kwa Njira Zopangira Mafilimu Ochepa: MOCVD, Magnetron Sputtering, ndi PECVD

Pakupanga ma semiconductor, pomwe kujambula ndi kujambula ndizomwe zimatchulidwa pafupipafupi, njira zama epitaxial kapena zowonda zamakanema ndizofunikanso chimodzimodzi. Nkhaniyi ikuwonetsa njira zingapo zojambulira filimu zoonda zomwe zimagwiritsidwa ntchito popanga chip, kuphatikizaMtengo wa MOCVD, magnetron sputtering,ndiMtengo wa PECVD.

Chifukwa Chiyani Njira Zakanema Zakanema Zili Zofunikira Pakupanga Chip?

Mwachitsanzo, taganizirani za buledi wophikidwa wamba. Payokha, ikhoza kulawa momveka bwino. Komabe, popaka pamwamba ndi masukisi osiyanasiyana—monga phala la nyemba kapena madzi okoma a chimera—mungathe kusinthiratu kukoma kwake. Zopaka zokometsera izi ndizofananamafilimu woondamu semiconductor njira, pamene flatbread palokha amaimiragawo lapansi.

Pakupanga chip, mafilimu oonda amagwira ntchito zambiri - kusungunula, kuyendetsa bwino, kusuntha, kuyamwa kwa kuwala, ndi zina zotero-ndipo ntchito iliyonse imafuna njira yowonetsera.

1. Metal-Organic Chemical Vapor Deposition (MOCVD)

MOCVD ndi njira yapamwamba kwambiri komanso yolondola yomwe imagwiritsidwa ntchito poyika mafilimu apamwamba kwambiri a semiconductor ndi nanostructures. Zimagwira ntchito yofunika kwambiri popanga zida monga ma LED, ma lasers, ndi zamagetsi zamagetsi.

Zigawo zazikulu za MOCVD System:

• Njira Yoperekera Gasi
  Udindo wa kuyambika bwino kwa reactants mu chipinda chochitira. Izi zikuphatikiza kuyendetsa bwino kwa:

• Mpweya wonyamulira

• Metal-organic precursors

• Mipweya ya Hydride
  Dongosololi lili ndi mavavu anjira zambiri kuti asinthe pakati pa kukula ndi kuyeretsa.

• Rection Chamber
  Mtima wa dongosolo kumene kukula kwenikweni zinthu kumachitika. Zigawo zikuphatikizapo:

  • Graphite susceptor (chotengera gawo lapansi)

  • Heater ndi masensa kutentha

  • Optical ports yowunikira mu-situ

  • Mikono ya robotiki yonyamula / kutsitsa

• Growth Control System
  Zili ndi zowongolera zosinthika komanso makompyuta apakompyuta. Izi zimatsimikizira kuwunika kolondola komanso kubwereza nthawi yonse yoyika.

• In-situ Monitoring
  Zida monga pyrometers ndi reflectometers muyeso:

  • Makulidwe a kanema

  • Kutentha kwapamtunda

  • Kupindika kwa gawo lapansi
    Izi zimathandizira kuyankha kwanthawi yeniyeni ndikusintha.

• Exhaust Treatment System
  Amachiza zinthu zapoizoni pogwiritsa ntchito kuwonongeka kwamafuta kapena mankhwala othandizira kuti atsimikizire chitetezo komanso kutsata chilengedwe.

Kukonzekera kwa Showerhead Yotseka (CCS):

Mu ofukula MOCVD reactors, kamangidwe ka CCS amalola mpweya kuti uniformly jekeseni kudzera alternating nozzles mu shawahead dongosolo. Izi zimachepetsa zomwe zimachitika msanga komanso zimawonjezera kusakanikirana kofanana.

• Thechopondera cha graphite chozungulirakumathandizanso kuti ma homogenize malire osanjikiza a mpweya, kuwongolera filimu yofananira pa mtanda.

2. Magnetron Sputtering

Magnetron sputtering ndi njira yopangira nthunzi (PVD) yomwe imagwiritsidwa ntchito kwambiri poyika mafilimu opyapyala ndi zokutira, makamaka pamagetsi, ma optics, ndi zoumba.

Mfundo Yogwirira Ntchito:

1. Zinthu Zolinga
   Zomwe ziyenera kuyikidwa - zitsulo, oxide, nitride, ndi zina zotero - zimayikidwa pa cathode.

2. Chamber ya Vacuum
   Njirayi imachitidwa pansi pa vacuum yapamwamba kuti isawonongeke.

3. Plasma Generation
   Mpweya wa inert, makamaka argon, umapangidwa ndi ionized kupanga plasma.

4. Ntchito ya Magnetic Field
   Mphamvu ya maginito imatsekera ma elekitironi pafupi ndi chandamale kuti apititse patsogolo luso la ionization.

5. Sputtering Process
   Ma Ioni amawombera chandamale, kutulutsa maatomu omwe amayenda m'chipindamo ndikuyika pansi.

Ubwino wa Magnetron Sputtering:

• Kuyika Mafilimu Ofananakumadera akuluakulu.

• Kutha Kuyika Ma Compounds Complex, kuphatikizapo aloyi ndi zoumba.

• Tunable Process Parameterskuti muwongolere bwino makulidwe, kapangidwe kake, ndi kapangidwe kake.

• Ubwino Wafilimu Wapamwambandi kumamatira mwamphamvu ndi mphamvu zamakina.

• Kugwirizana Kwazinthu Zambiri, kuchokera ku zitsulo kupita ku ma oxides ndi nitrides.

• Low-Kutentha Ntchito, yoyenera pazigawo zosagwirizana ndi kutentha.

3. Plasma-Enhanced Chemical Vapor Deposition (PECVD)

PECVD imagwiritsidwa ntchito kwambiri poyika mafilimu owonda ngati silicon nitride (SiNx), silicon dioxide (SiO₂), ndi silicon amorphous.

Mfundo Yofunika:

Mu dongosolo la PECVD, mpweya wotsogolera umalowetsedwa m'chipinda cha vacuum kumene aplasma yotulutsa kuwalaimapangidwa pogwiritsa ntchito:

• RF chisangalalo

• DC high voltage

• Microwave kapena pulsed sources

Madzi a m'madzi a m'magazi amapangitsa kuti zinthu ziziyenda bwino m'gawo la gasi, n'kupanga mitundu yotakasuka yomwe imayikidwa pagawo laling'ono kuti apange filimu yopyapyala.

Njira Zoyikira:

1. Mapangidwe a Plasma
   Kusangalatsidwa ndi minda yamagetsi, mipweya yoyambira ionize kuti ipange ma radicals ndi ma ion.

2. Reaction ndi Transport
   Mitundu iyi imakumana ndi zochitika zina pamene ikupita ku gawo lapansi.

3. Zochita Zapamwamba
   Akafika pagawo laling'ono, amadsorbe, amachitapo kanthu, ndikupanga filimu yolimba. Zina mwazinthu zimatulutsidwa ngati mpweya.

Ubwino wa PECVD:

• Uniformity Wabwinomu kapangidwe ka filimu ndi makulidwe.

• Kumamatira Kwambiringakhale pa kutentha kochepa kwambiri.

• Mitengo Yokwera Kwambiri, ndikupangitsa kuti ikhale yoyenera kupanga mafakitale.

4. Njira Zowonetsera Mafilimu Ochepa

Kumvetsetsa mawonekedwe a mafilimu oonda ndikofunikira pakuwongolera bwino. Njira zodziwika bwino ndi izi:

(1) X-ray Diffraction (XRD)

• Cholinga: Unikani mawonekedwe a kristalo, zokhazikika za lattice, ndi mawonekedwe ake.

• Mfundo yofunika: Kutengera ndi Lamulo la Bragg, amayesa momwe ma X-ray amasinthira kudzera muzinthu za crystalline.

• Mapulogalamu: Crystallography, kusanthula gawo, kuyeza kwa zovuta, ndi kuwunika kwa filimu yopyapyala.

(2) Kusanthula ma Electron Microscopy (SEM)

• Cholinga: Yang'anani kapangidwe kapamwamba ndi mawonekedwe ang'onoang'ono.

• Mfundo yofunika: Amagwiritsa ntchito mtengo wa ma elekitironi kuti ayang'anire zomwe zili pamtunda. Zizindikiro zozindikiridwa (mwachitsanzo, ma elekitironi achiwiri ndi ammbuyo) zimawulula zambiri.

• Mapulogalamu: Sayansi yazinthu, nanotech, biology, ndi kusanthula kulephera.

(3) Atomic Force Microscopy (AFM)

• Cholinga: Zithunzi zowoneka pa atomiki kapena nanometer.

• Mfundo yofunika: Chofufumitsa chakuthwa chimayang'ana pamtunda ndikusunga mphamvu yolumikizana nthawi zonse; kusamuka koyima kumapanga chithunzithunzi cha 3D.

• Mapulogalamu: Kafukufuku wa Nanostructure, muyeso wa roughness pamwamba, maphunziro a biomolecular.