Chidule Chathunthu cha Njira Zopangira Mafilimu Ochepa: MOCVD, Magnetron Sputtering, ndi PECVD

Mu kupanga ma semiconductor, ngakhale kuti photolithography ndi etching ndi njira zomwe zimatchulidwa kwambiri, njira zoyika filimu yopyapyala kapena yopyapyala ndizofunikanso. Nkhaniyi ikulongosola njira zingapo zodziwika bwino zoyika filimu yopyapyala zomwe zimagwiritsidwa ntchito popanga ma chip, kuphatikizapoMOCVD, kupopera kwa magnetronndiPECVD.

Nchifukwa chiyani njira zopangira mafilimu opyapyala ndizofunikira popanga ma chips?

Mwachitsanzo, taganizirani buledi wophikidwa wokha. Wokha, ukhoza kukhala wopanda kukoma. Komabe, popaka pamwamba ndi sosi zosiyanasiyana—monga phala la nyemba kapena madzi a malt otsekemera—mungasinthe kukoma kwake kwathunthu. Zophimba izi zowonjezera kukoma ndizofanana ndimafilimu owondamu njira za semiconductor, pomwe flatbread yokha imayimiragawo lapansi.

Pakupanga ma chip, mafilimu opyapyala amagwira ntchito zosiyanasiyana—kuteteza kutentha, kuyendetsa bwino mpweya, kusinthasintha kwa mpweya, kuyamwa kuwala, ndi zina zotero.—ndipo ntchito iliyonse imafuna njira inayake yosungiramo kuwala.

1. Kutulutsa nthunzi ya mankhwala achitsulo ndi zachilengedwe (MOCVD)

MOCVD ndi njira yapamwamba kwambiri komanso yolondola yomwe imagwiritsidwa ntchito poika mafilimu opyapyala a semiconductor apamwamba komanso ma nanostructures. Imagwira ntchito yofunika kwambiri popanga zipangizo monga ma LED, ma laser, ndi zamagetsi zamagetsi.

Zigawo Zofunika Kwambiri za MOCVD System:

• Njira Yotumizira Gasi
  Udindo wake ndi kulowetsa molondola ma reactants mu chipinda choyankhira. Izi zikuphatikizapo kuwongolera kayendedwe ka madzi:

• Mpweya wonyamula katundu

• Zoyambira zachitsulo ndi zachilengedwe

• Mpweya wa hydride
  Dongosololi lili ndi ma valve a njira zambiri osinthira pakati pa njira zokulira ndi zotsukira.

• Chipinda Chochitira Zinthu Zokhudza Kuyankha
  Mtima wa dongosololi komwe kukula kwenikweni kwa zinthu kumachitika. Zigawo zake ndi izi:

  • Graphite susceptor (chotengera gawo lapansi)

  • Zowunikira kutentha ndi kutentha

  • Madoko owoneka bwino owunikira mkati mwa malo

  • Manja a robotic ogwiritsira ntchito kukweza/kutsitsa ma wafer okha

• Dongosolo Lolamulira Kukula
  Ili ndi zida zowongolera za logic zomwe zingathe kukonzedwa komanso kompyuta yomwe imayang'anira. Izi zimatsimikizira kuyang'anira molondola komanso kubwerezabwereza panthawi yonse yoyika deta.

• Kuwunika Malo Omwe Ali
  Zipangizo monga ma pyrometer ndi ma reflectometer zimayesa:

  • Kukhuthala kwa filimu

  • Kutentha kwa pamwamba

  • Kupindika kwa gawo lapansi
    Izi zimathandiza kuti mulandire ndemanga ndi kusintha nthawi yeniyeni.

• Dongosolo Lothandizira Utsi
  Amachiza zinthu zoopsa pogwiritsa ntchito kutentha kapena mankhwala oletsa kuwonongeka kuti atsimikizire kuti zinthuzo zikutsatira malamulo a chitetezo komanso kuti chilengedwe chizitsatira malamulowo.

Kapangidwe ka Showerhead Yotsekedwa (CCS):

Mu ma reactor a MOCVD oyima, kapangidwe ka CCS kamalola mpweya kuti ulowetsedwe mofanana kudzera m'ma nozzles osinthasintha mu kapangidwe ka shawa. Izi zimachepetsa kuyankha msanga komanso zimawonjezera kusakaniza kofanana.

• Thechozungulira cha graphitekumathandizanso kuti mpweya ukhale wofanana, zomwe zimathandiza kuti filimuyo ikhale yofanana pa wafer.

2. Kutulutsa Magnetron

Kupopera kwa Magnetron ndi njira yochotsera nthunzi ya thupi (PVD) yomwe imagwiritsidwa ntchito kwambiri poika mafilimu ndi zokutira zopyapyala, makamaka mu zamagetsi, zowunikira, ndi zoumba.

Mfundo Yogwirira Ntchito:

1. Zinthu Zofunika
   Chiyambi cha zinthu zomwe ziyenera kuyikidwa—chitsulo, okusayidi, nitride, ndi zina zotero—chimakhazikika pa cathode.

2. Chipinda Chotsukira
   Njirayi imachitika pansi pa vacuum yayikulu kuti ipewe kuipitsidwa.

3. Kupanga Magazi
   Mpweya wopanda mphamvu, womwe nthawi zambiri umakhala argon, umasinthidwa kukhala ionized kuti upange plasma.

4. Kugwiritsa Ntchito Maginito
   Mphamvu ya maginito imatseka ma elekitironi pafupi ndi cholinga kuti iwonjezere mphamvu ya ionization.

5. Njira Yothira Madzi
   Ma ioni amaukira chandamalecho, kutulutsa maatomu omwe amayenda m'chipindamo ndikugwera pansi.

Ubwino wa Magnetron Sputtering:

• Kuyika Filimu Yofananakudutsa m'madera akuluakulu.

• Kutha Kuyika Ma Compounds Ovuta, kuphatikizapo aloyi ndi zoumbaumba.

• Magawo Osinthika a Njirakuti muwongolere bwino makulidwe, kapangidwe kake, ndi kapangidwe kake.

• Kanema Wapamwamba Kwambiriyokhala ndi kumatirira kwamphamvu komanso mphamvu yamakina.

• Kugwirizana kwa Zinthu Zambiri, kuyambira zitsulo mpaka ma oxide ndi ma nitride.

• Ntchito Yotentha Kwambiri, yoyenera kugwiritsa ntchito zinthu zomwe zimakhudzidwa ndi kutentha.

3. Kutulutsa Nthunzi Yowonjezera Madzi mu Plasma (PECVD)

PECVD imagwiritsidwa ntchito kwambiri poika mafilimu opyapyala monga silicon nitride (SiNx), silicon dioxide (SiO₂), ndi silicon yopanda mawonekedwe.

Mfundo yaikulu:

Mu dongosolo la PECVD, mpweya woyambira umalowetsedwa mu chipinda chopanda mpweya komweplasma yotulutsa kuwalaimapangidwa pogwiritsa ntchito:

• Kusangalatsa kwa RF

• DC yamagetsi okwera

• Ma microwave kapena magwero opangidwa ndi pulsed

Plasma imayambitsa zochitika za gasi, ndikupanga mitundu yosinthika yomwe imayikidwa pa substrate kuti ipange filimu yopyapyala.

Njira Zoperekera Zinthu:

1. Kupanga kwa Plasma
   Posangalala ndi ma electromagnetic fields, mpweya woyambirira umapanga ma ioni kuti apange ma radical ndi ma ioni osinthika.

2. Kuyankha ndi Kuyendera
   Mitundu iyi imakumana ndi zotsatira zina pamene ikupita ku substrate.

3. Kuyankha Pamwamba
   Akafika pansi pa nthaka, amayamwa, amachitapo kanthu, ndipo amapanga filimu yolimba. Zina mwa zinthu zomwe zimatuluka zimatulutsidwa ngati mpweya.

Ubwino wa PECVD:

• Kufanana Kwabwino Kwambirimu kapangidwe ka filimu ndi makulidwe ake.

• Kumamatira Kwamphamvungakhale kutentha kochepa kwambiri.

• Mitengo Yaikulu Yochotsera, zomwe zimapangitsa kuti ikhale yoyenera kupanga mafakitale.

4. Njira Zofotokozera Kanema Woonda

Kumvetsetsa makhalidwe a mafilimu opyapyala ndikofunikira kwambiri pakuwongolera khalidwe. Njira zodziwika bwino ndi izi:

(1) Kusiyanitsa kwa X-ray (XRD)

• Cholinga: Unikani kapangidwe ka kristalo, zinthu zokhazikika za lattice, ndi momwe zinthu zilili.

• Mfundo yaikulu: Kutengera ndi lamulo la Bragg, limayesa momwe ma X-ray amasinthira kudzera mu chinthu chopangidwa ndi kristalo.

• Mapulogalamu: Crystallography, kusanthula gawo, kuyeza kupsinjika, ndi kuwunika filimu yopyapyala.

(2) Kusanthula Maikroskopi a Maelekitironi (SEM)

• CholingaYang'anirani mawonekedwe a pamwamba ndi kapangidwe kake kakang'ono.

• Mfundo yaikulu: Amagwiritsa ntchito kuwala kwa ma elekitironi pofufuza pamwamba pa chitsanzo. Zizindikiro zodziwika (monga ma elekitironi achiwiri ndi ozungulira) zimavumbula tsatanetsatane wa pamwamba.

• Mapulogalamu: Sayansi ya zinthu, nanotech, biology, ndi kusanthula kulephera.

(3) Microscopy ya Mphamvu ya Atomiki (AFM)

• Cholinga: Zithunzi zili pamalo a atomiki kapena nanometer resolution.

• Mfundo yaikulu: Chofufuzira chakuthwa chimayang'ana pamwamba pomwe chikusunga mphamvu yolumikizana nthawi zonse; kusuntha koyima kumapanga mawonekedwe a 3D.

• Mapulogalamu: Kafukufuku wa kapangidwe ka zinthu, kuyeza kukhwima kwa pamwamba, maphunziro a biomolecular.